粉末加工工艺对银钯合金靶材制备的影响  

Influence of powder processing technology on the preparation of silver-palladium alloy target

作　　者：罗浩 谭志龙[2] 闻明[2] 宁哲达 王爱华[1] 李晨辉[1] LUO Hao;TAN Zhi-long;WEN Ming;NING Zhe-da;WANG Ai-hua;LI Chen-hui(School of Materials Science and Engineering,Huazhong University of Science and Technology,Wuhan 430074,China;Kunming Institute of Precious Metals,Kunming 650106,China)

机构地区：[1]华中科技大学材料学院,武汉430074 [2]昆明贵金属研究所,昆明650106

出　　处：《贵金属》2022年第4期24-30,36,共8页Precious Metals

基　　金：云南省科技厅科研院所技术开发研究专项(2019DC003)。

摘　　要：粉末冶金法制备的银钯合金靶材存在孔隙率较高和相对密度较低的缺点。采用不同的粉末工艺制备了银钯合金粉末样品,使用氢氧含量分析、表面形貌分析、XRD线形分析等方法,探究使用各组样品经真空热压烧结制备的靶材的差异及其机理。结果表明,球磨后的合金粉末在烧结前有必要真空煅烧除氧;随着球磨时间和球磨转速的增加,粉末先细化后形成薄片,烧结体的相对密度先上升后下降;100 r/min球磨2 h所得粉末制备的烧结体具有最高的相对密度,为99.264%。Silver-palladium alloy target prepared by powder metallurgy has disadvantages of high porosity and low relative density. Different powder processes were used to prepare silver-palladium alloy powder samples from which the targets were produced with the vacuum hot pressing technique. The differences in hydrogen and oxygen contents, surface morphology and X-ray diffraction line profile of the targets were investigated and involved mechanism was also explored. The results demonstrate that the alloy powder after ball milling needs to be calcined in vacuum to remove oxygen before sintering. With an increase of ball milling time and speed, the powder was first refined and then transformed into a thin slice, and the relative density of the sintered body first increased and then declined. The powder, obtained by ball milling for 2 h at 100 r/min, can endow the resulting target with a highest relative density of 99.264%.

关 键 词：粉末冶金 银钯靶材 真空煅烧 球磨 密度 

分 类 号：TG146.3[一般工业技术—材料科学与工程]