用于声表面波高温传感应变传递的过渡层薄膜  

Transition Layer Thin Film for Strain Transfer of Surface Acoustic Wave at High Temperature

作　　者：宋心雨 金浩[1] 董树荣[1] 骆季奎[1] SONG Xinyu;JIN Hao;DONG Shurong;LUO Jikui(Zhejiang Key Laboratory of Advanced Micro-Nano Electronic Devices and Intelligent Systems,College of Information Science and Electronic Engineering,Zhejiang University,Hangzhou 310027,China)

机构地区：[1]浙江大学信息与电子工程学院,浙江省先进微纳电子器件与智能系统重点实验室,浙江杭州310027

出　　处：《压电与声光》2022年第6期851-853,共3页Piezoelectrics & Acoustooptics

基　　金：科技部重点研发专项基金资助项目(No.2018YFB2002500);国家基金区域创新基金资助项目(No.U20A20172,No.U1909212);浙江省重点研发基金资助项目(No.2021C05004)。

摘　　要：声表面波(SAW)器件广泛应用于极端环境传感,硅酸镓镧(LGS)是常用高温压电晶体,但高温下应变胶因结合力导致应变传递效果不佳。该文研究了高温环境下应变传感的过渡层薄膜技术,提出了一种新的过渡层薄膜解决方案及其工艺技术,可实现高温应变胶水传递应变更稳定的效果。结果表明,采用溅射Al再氧化可显著提升LGS与高温胶的结合力,从而实现很好的应变传递,使用这种过渡层实现了500℃下超大量程(1 000με)测量。The surface acoustic wave(SAW) devices are widely used in extreme environmental sensing. Lanthanum gallium silicate(LGS) is a commonly used high-temperature piezoelectric crystal, but at high temperature, the strain glue cannot effectively transmit strain due to the bonding force. The transition layer thin film technology for the strain sensing at high temperature is studied in this paper. A new method and process technology of the transition layer thin film are proposed, which can realize the effect of more stable strain transition of the high temperature strain glue. The results show that the use of sputtering Al re-oxidation can significantly improve the bonding force between LGS and high-temperature glue, so as to realize good strain transfer. A super-large-scale measurement of 1 000 με is realized at 500 ℃ by using this transition layer.

关 键 词：高温应用 高温应变测量 应变传递 压电晶体 声表面波(SAW) 

分 类 号：TN61[电子电信—电路与系统] TP212[自动化与计算机技术—检测技术与自动化装置]