叉指形电极管状压电元件电极制备与极化研究  

Study on Preparation and Polarization of Piezoelectric Actuator with Tubular Interdigitated Electrodes

作　　者：曾奥柯 刘永刚[1] 闫鹏飞 张树良 ZENG Aoke;LIU Yonggang;YAN Pengfei;ZHANG Shuliang(School of Mechatronics Engineering,Henan University of Science and Technology,Luoyang 471003,China)

机构地区：[1]河南科技大学机电工程学院,河南洛阳471003

出　　处：《压电与声光》2022年第6期890-895,共6页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(50975075);河南省重点攻关基金资助项目(212102210065);河南省产学研合作基金资助项目(182107000012)。

摘　　要：该文制备了PZT-52压电陶瓷柱,采用丝网印刷法在压电陶瓷基体表面附着电极,研究了管状陶瓷表面电极的印刷工艺流程。利用油浴热极化法对元件进行极化实验,通过对元件自由位移的检测,研究了极化时间对压电驱动器位移的影响,分析了极化时间对电畴转向和银电极成型质量的影响原理。结果表明,随着极化时间的增加轴向驱动位移逐渐增强,在极化电压为500 V,极化温度为110℃,极化时间为60 min时,叉指形电极管状压电元件最大轴向位移为0.30μm。The PZT-52 piezoelectric ceramic column was prepared in this paper. The interdigitated electrodes were fabricated on the surface of piezoceramic substrate by screen printing, and the printing process flow of cylindrical ceramic surface electrodes was studied. The polarization tests of the samples were carried out using the oil bath thermal polarization method. By testing the free axial displacements of the actuators, the effect of the polarization time on the displacements of the piezoceramic actuator was studied. And the influence principle of polarization time on the domain turning and silver electrode forming quality was analyzed. The results show that the axial displacement increases gradually with the increase of polarization time. When the polarization voltage is 500 V, the polarization tempaerature is 110 ℃, and the polarization time is 60 min, the maximum displacement of the actuator is 0.30 μm.

关 键 词：叉指形电极 管状压电驱动器 电极制备 极化时间 轴向位移 

分 类 号：TN36[电子电信—物理电子学] TN305[电气工程—电机] TM303.5