超光滑碳纳米薄膜低黏附特性及其机理研究  

Study on the low adhesion properties and mechanism of super smooth carbon nanofilms

作　　者：陈福海 范雪 Chen Fuhai;Fan Xue(College of Mechatronics and Control Engineering,Shenzhen University,Guangdong Shenzhen,518060,China)

机构地区：[1]深圳大学机电与控制工程学院,广东深圳518060

出　　处：《机械设计与制造工程》2022年第12期130-134,共5页Machine Design and Manufacturing Engineering

基　　金：广东省自然科学基金自由申请项目(2018A030313908);深圳市科技计划基础研究(自由探索)项目(JCYJ20170817100822005)。

摘　　要：纳米表面的低黏附通常采用增加表面粗糙度或表面构型来实现。对电子照射和离子照射制备的碳纳米薄膜进行表面形貌表征和黏附特性测试。结果表明,黏附力受到表面粗糙度和接触面积的共同影响,离子照射制备的碳纳米薄膜具有平均粗糙度为0.12 nm的超光滑表面及弹性变形内4.3 nN的低黏附特性,其超光滑低黏附特性对微纳器件表面开发具有重要的意义。The surface adhesion is usually decreased by increasing the surface roughness or designing surface configuration. The surface morphologies and adhesion behaviors of carbon nanofilms deposited with ion and electron irradiations are investigated. The results show that both surface roughness and contact area affect the surface adhesion of carbon nanofilms. The ion irradiated carbon nanofilms exhibite low surface roughness of about 0.12 nm and low surface adhesive force of 4.3 nN under elastic deformation.The carbon nanofilm with super smooth surface and low adhesion properties shed light on the development of surface applications on microand neno devices.

关 键 词：黏附特性 碳纳米薄膜 光滑表面 离子照射 

分 类 号：TH145[一般工业技术—材料科学与工程]