High-sensitivity refractive index sensors based on Fano resonance in a metal-insulator-metal based arc-shaped resonator coupled with a rectangular stub  

作　　者：Shubin Yan Hao Su Xiaoyu Zhang Yi Zhang Zhanbo Chen Xiushan Wu Ertian Hua 闫树斌;苏浩;张晓宇;张怡;陈展博;吴秀山;华尔天(School of Electrical Engineering,Zhejiang University of Water Resources and Electric Power,Zhejiang–Belarus Joint Laboratory of Intelligent Equipment and System for Water Conservancy and Hydropower Safety Monitoring,Hangzhou 310018,China;Hangzhou Hikvision Digital Technology Co.,Ltd.,Hangzhou 310018,China;School of Electrical and Control Engineering,North University of China,Taiyuan 030051,China)

机构地区：[1]School of Electrical Engineering,Zhejiang University of Water Resources and Electric Power,Zhejiang–Belarus Joint Laboratory of Intelligent Equipment and System for Water Conservancy and Hydropower Safety Monitoring,Hangzhou 310018,China [2]Hangzhou Hikvision Digital Technology Co.,Ltd.,Hangzhou 310018,China [3]School of Electrical and Control Engineering,North University of China,Taiyuan 030051,China

出　　处：《Chinese Physics B》2022年第10期578-582,共5页中国物理B（英文版）

基　　金：supported in part by the National Natural Science Foundation of China (Grant Nos. 61875250 and 61975189);the Zhejiang Provincial Natural Science Foundation of China (Grant Nos. LD21F050001 and Y21F040001);the Key Research Project by Department of Water Resources of Zhejiang Province (Grant No. RA2101);the Key Research and Development Project of Zhejiang Province (Grant No. 2021C03019);the Key R&D Projects of Shanxi Province (Grant Nos. 201903D421032 and 01804D131038);the Scientific Research Foundation of Zhejiang University of Water Resources and Electric Power (Grant No. xky2022032)。

摘　　要：A metal-insulator-metal(MIM)-based arc-shaped resonator coupled with a rectangular stub(MARS) structure is proposed. This structure can generate two tunable Fano resonances originating from two different mechanisms. The structure has the advantage of being sensitive to the refractive index, and this feature makes it favorable for application in various microsensors. The relationship between the structural parameters and Fano resonance is researched using the finite element method(FEM) based on the software COMSOL Multiphysics 5.4. The simulation reveals that the sensitivity reaches1900 nm/refractive index unit(RIU), and the figure of merit(FOM) is 23.75.

关 键 词：Fano resonance metal-insulator-metal(MIM)waveguide refractive index sensor Fabry-Perot(F-P)cavity 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]