磁悬浮转子真空计混合磁悬浮建模与控制研究  

Modeling and Control of Hybrid Magnetic Levitation for Spinning Rotor Gauge

作　　者：李博文 李得天[1,2] 习振华 郭美如[1] 周明旭[2] LI Bowen;LI Detian;XI Zhenhua;GUO Meiru;ZHOU Mingxu(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China;School of Mechanical Engineering and Automation,Northeastern University,Shenyang 110819,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000 [2]东北大学机械工程与自动化学院,沈阳110819

出　　处：《真空与低温》2023年第1期43-50,共8页Vacuum and Cryogenics

基　　金：国家自然科学基金(62071209)。

摘　　要：针对磁悬浮转子真空计的永磁-电磁混合磁悬浮系统,考虑其磁悬浮结构中的永磁体影响,计算了磁悬浮轴向的磁场分布,建立了混合磁悬浮系统的频域模型。设计了永磁电流刚度系数与永磁位移刚度系数,用来表征线圈电流、转子距下线圈的距离及永磁体参数对混合磁悬浮系统的影响,并依据这两个参数对悬浮系统的设计做出限制与规定。设计了模拟比例-积分-微分控制电路以进行悬浮控制。最后按照此控制模型在真空下用测量头进行压力测量实验。实验结果表明,根据设计的混合磁悬浮模型的线圈参数与安装位置,在模拟比例-积分-微分控制电路的控制下,可以完成9×10^(-5)~1 Pa的压力测量。For the permanent magnet-electromagnetic hybrid magnetic levitation system of the spinning rotor gauge,the influence of the permanent magnet in the magnetic levitation structure is considered.The magnetic field distribution in the axial direction of magnetic levitation is calculated,and the frequency domain model of the hybrid magnetic levitation system is established.The permanent magnet current stiffness coefficient and the permanent magnet displacement stiffness coefficient are designed to characterize the influence of coil current,the distance between the rotor and the lower coil and the permanent magnet parameters on the hybrid magnetic levitation system,and to limit and specify the design of the suspension system according to these two parameters.An analog proportional-integral-differential control circuit is designed for suspension control.Finally,according to this control model,the pressure measurement experiment is carried out with the measuring head under vacuum.Experimental results show that the pressure measurement of 9×10^(-5)~1Pa can be completed under the control of the proportional-integral-differential control circuit of the hybrid magnetic levitation model according to the design.

关 键 词：真空计量 磁悬浮转子真空计 混合磁悬浮 模拟电路 

分 类 号：TB772[一般工业技术—真空技术]