偏光检测技术在玻璃封接应力控制中的应用  

Application of polarized light detection technology in glass sealing stress control

作　　者：李正林[1] 刘仁涛 马迎英[1] 万瑞芸[1] 陶青[1] 金洪菊 Li Zhenglin;Liu Rentao;Ma Yingying;Wan Ruiyun;Tao Qing;Jin Hongju(Institute of Electronic Engineering,China Academy of Engineering Physics,Mianyang Sichuan,621999)

机构地区：[1]中国工程物理研究院电子工程研究所,四川绵阳621999

出　　处：《电子测试》2022年第22期96-98,54,共4页Electronic Test

摘　　要：电真空器件生产制作工艺中常采用玻璃材料结构连接仪器设备,玻璃封接结构生产时使用灯工艺烧制工艺,在实际生产试验过程中会发生玻璃结构脆断的情况。本文分析了玻璃脆断的主要因素为玻璃烧制局部应力过大,并提出了使用偏光检测的方法,对玻璃烧制后的应力分布进行直观检测和筛选,避免应力过大的产品进入后道工序,保障了玻璃结构的可靠性,提高了电真空器件生产制造合格率。In the production process of vacuum electronic device, the glass structure is often used to connect the instrument and equipment. And the calcination craft is always adopted for the production of glass sealing structure. During the actual production and test process, the brittle failure of glass structure will be happened. This paper indicates that too large local stress in glass firing process is the main factor of its brittleness, also puts forward the method of polarizing light detection to visually detect and screen the stress distribution after glass firing, so as to avoid the products with large stress entering the following process. This can ensure the reliability of glass structure, and improve the pass rate of vacuum electronic device.

关 键 词：玻璃封接应力偏光检测 应力控制 可靠性 

分 类 号：TN247[电子电信—物理电子学]