单片集成式主振荡功率放大器研究进展  

Research progress of monolithic integration master-oscillation power-amplifiers

作　　者：谭满清[1,2] 游道明 郭文涛 刘维华[1,2] TAN Man-qing;YOU Dao-ming;GUO Wen-tao;LIU Wei-hua(State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;College of Materials Science and Opto-electronics Technology,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院半导体研究所集成光电子学国家重点实验室,北京100083 [2]中国科学院大学材料科学与光电技术学院,北京100049

出　　处：《中国光学（中英文）》2023年第1期61-75,共15页Chinese Optics

基　　金：国家自然科学基金资助项目(No.61935018);国家电网公司科技项目(No.5700-202058482A-0-0-00)。

摘　　要：单片集成式主振荡功率放大器(MOPA)具有体积小、功率大、光束质量高等优势,通过集成布拉格光栅,还能够实现窄线宽和动态单模,在倍频、泵浦、光通信和传感等领域具有重要应用价值,是近年来半导体光电子器件的研究热点。本文梳理了单片集成式MOPA的主流结构,包括锥形、脊型、布拉格光栅型和三段式MOPA,以各自的工作原理和性能特征为出发点,介绍其主要的研究方向,并结合它们各自面临的问题介绍最新的发展趋势。针对单片集成式MOPA中普遍存在的高功率下光束质量退化的问题,梳理了近年在外延层结构、腔面光学薄膜和电极设置等方面的优化设计,重点总结了单片集成式MOPA在提高光束质量及高功率、容线宽及高亮度方面的重要进展。围绕不同领域的应用需求,整理了具备高功率、窄线宽、高光束质量和高亮度等性能特征的单片集成式MOPA的研究进展,最后展望了单片集成式MOPA的发展趋势。Besides its advantages in volume,power and beam quality,a monolithic integration Master-Oscillation Power-amplifier(MOPA)can also realize a narrower linewidth and dynamic single-mode by integrating Bragg grating.Its application value is high in the fields of frequency doubling,pumping,optical communication and sensing,which makes it a popular research topic in recent years.This paper firstly went over the mainstream structure and characteristics of monolithic integrated MOPA,including a tapered amplifier,ridge amplifier,Bragg grating and three-section MOPA.Based on their working principles and performance characteristics,we introduce the main research directions and the latest development trends in combination with their problems.Aiming at the problem of beam quality degradation at high power in monolithic integrated MOPA,the optimal design of epitaxial layer structure,facet optical film and electrode aspects are then summarized for monolithic integrated MOPAs.After that,we sort out the research progress of MOPAs with different performance characteristics for various application requirements including high power,narrow linewidth,high beam quality and high brightness.Finally,we prospect the development trend of monolithic integrated MOPA.

关 键 词：主振荡功率放大器 单片集成结构 半导体激光器 半导体光放大器 优化设计 

分 类 号：TN248.4[电子电信—物理电子学]