微透镜阵列衍射效应对夏克一哈特曼波前探测器的影响分析  

Analysis of influence of diffraction effect of microlens array on Shack-Hartmann wavefront sensor

作　　者：朱沁雨 陈梅蕊 陆焕钧 樊丽娜 彭建涛 孙会娟[4] 徐国定 毛红敏[1,2] 曹召良 ZHU Qin-yu;CHEN Mei-rui;LU Huan-jun;FAN Li-na;PENG Jian-tao;SUN Hui-juan;XU Guo-ding;MAO Hong-min;CAO Zhao-liang(Suzhou University of Science and Technology,School of Physical Science and Technology,Suzhou 215009,China;Jiangsu Key Laboratory of Micro and Nano Heat Fluid Flow Technology and Energy Application,Suzhou 215009,China;Shanghai Institute of Satellite Engineering,China Aerospace Science and Technology Corporation,Shanghai 201109,China;Institute of Mathematics and Physics,Beijing Union University,Beijing 100101,China)

机构地区：[1]苏州科技大学物理科学与技术学院,江苏苏州215009 [2]江苏省微纳热流技术与能源应用重点实验室,江苏苏州215009 [3]中国航天科技集团公司上海卫星工程研究所,上海201109 [4]北京联合大学数理部,北京100101

出　　处：《中国光学（中英文）》2023年第1期94-102,共9页Chinese Optics

基　　金：“十四五”江苏省重点学科资助项目(No.2021135);中国航天科技集团公司第八研究院产学研合作基金资助项目(No.SAST2020-025);北京联合大学科研项目资助(No.ZK70202007);江苏省自然科学基金青年基金项目(No.BK20220640);江苏省基础科学(自然科学)研究面上项目(No.22KJB150011)。

摘　　要：微透镜阵列的衍射效应会影响夏克—哈特曼波前探测器的探测精度。本文根据惠更斯-菲涅耳衍射理论建立二维微透镜阵列衍射模型,模拟分析使用理想平行光入射微透镜阵列时在焦平面产生的二维衍射光斑阵列。然后,通过计算衍射光斑偏移一个像素的过程中质心的误差,确定最大质心计算误差。接着,利用模式法进行波前重构,获得波前探测误差。仿真结果显示:在偏移0.21和0.79个像素,即波面偏转0.03°和0.13°时,衍射导致的波前误差最大为0.125λ。最后,实验验证了该误差计算方法的有效性。该研究结果可为夏克一哈特曼波前探测器的设计提供理论依据。The diffraction effect of microlens array will affect the detection accuracy of Shack-Hartmann wavefront sensor.Based on Huygens-Fresnel diffraction theory,a two-dimensional microlens array diffraction model is established to simulate and analyze the two-dimensional diffraction spot array generated in the focal plane when the ideal parallel light is incident on the microlens array.First,the maximum centroid calculation error is determined by calculating the centroid error in the process of diffraction spot shifting by one pixel.Then the wavefront is reconstructed by using the modal method to obtain the wavefront detection error.The simulation results show that the maximum wavefront error caused by diffraction is 0.125λat 0.21 and0.79 pixels offset,that is,when the wavefront deflection is 0.03°and 0.13°.Finally,an experiment is performed to verify the effectiveness of the error calculation method.This work provides a theoretical basis for the design of shack-Hartmann wavefront detector.

关 键 词：哈特曼波前探测器 微透镜阵列 衍射效应 波前重构 探测误差 

分 类 号：O436.1[机械工程—光学工程]