十字型微谐振梁多场耦合非线性振动分析  

Multi-field coupling nonlinear vibration analysis of cross shaped micro resonant beam

作　　者：韩光 许立忠[1] HAN Guang;XU Lizhong(College of Mechanical Engineering,Yanshan University,Qinhuangdao 066004,China;Department of Mechanical and Electrical Engineering,Hebei Construction Material Vocational and Technical College,Qinhuangdao 066004,China)

机构地区：[1]燕山大学机械工程学院,河北秦皇岛066004 [2]河北建材职业技术学院机电工程系,河北秦皇岛066004

出　　处：《振动与冲击》2023年第1期308-317,共10页Journal of Vibration and Shock

基　　金：河北省重点基础研究项目(13961701D)。

摘　　要：为了提高电容检测传感器的检测精度,提出了一种十字型微谐振梁。将其简化为多场耦合振动模型,在考虑分子力与电场力的情况下建立动力学方程。求得其非线性振动固有频率及其变化规律,分析了不同参数对位移响应的影响。利用微加工技术制作十字型微谐振梁,采用静电激励—电容检测方法对其测试。创新性地将激振端与拾振端采用隔离带分开,使输出的电压信号不掺杂激励信号,结果更加真实准确。使用Owen交流电桥进行检测。结果表明:谐振梁尺寸较小时,分子力对谐振梁非线性振动影响较大。在忽略与考虑分子力时,相对误差分别为4.706%与1.971%,考虑分子力时理论值更加贴近于实测值。十字型微谐振梁的品质因数为105.8,较传统一字梁,检测信号更为明显。Here,to improve detection accuracy of capacitance detection sensor,a cross shaped micro resonant beam was proposed.The beam was simplified as a multi-field coupling vibration model,and its dynamic equations were established considering molecular force and electric field force.The beam nonlinear vibration’s natural frequency and its variation law were solved,and effects of different parameters on the beam displacement response were analyzed.The cross shaped micro resonant beam was fabricated with micro machining technology and tested using the electrostatic excitation-capacitance detection method.The exciting end and pickup end were innovatively separated with an isolation band to make output voltage signal not be mixed with exciting signal,and the results be more actual and correct.Owen AC bridge was adopted for detection.The results showed that molecular force has a larger influence on the proposed beam’s nonlinear vibration when its size is smaller;when molecular force is ignored and considered,relative errors are 4.706%and 1.971%,respectively;when molecular force is considered,the proposed beam vibration theoretical value is closer to its measured value;the quality factor of the proposed beam is 105.8,its detection signal is more obvious than that of traditional straight beam.

关 键 词：微机电系统(MEMS) 非线性振动 分子力 多场耦合 十字型谐振梁 

分 类 号：TH113.1[机械工程—机械设计及理论]