抛光机用空气静压轴承静态特性研究  

Study on Static Characteristics of Aerostatic Bearing for Polishing Machine

作　　者：徐嘉慧 冯艳冰 龚维纬 崔海龙[1] XU Jia-hui;FENG Yan-bing;GONG Wei-wei;CUI Hai-long(Institute of Machinery Manufacturing Technology,China Academy of Engineering Physics,Mianyang 621000,China)

机构地区：[1]中国工程物理研究院机械制造工艺研究所,绵阳621000

出　　处：《组合机床与自动化加工技术》2023年第1期34-37,42,共5页Modular Machine Tool & Automatic Manufacturing Technique

基　　金：国家重点研发计划(2020YFB2007600);国家自然科学基金面上项目(52075506);中国工程物理研究院创发基金(CX20200014);四川省科技计划项目(2021YJ0557)。

摘　　要：空气静压主轴是抛光机的核心基础部件,为实现金刚石刀具抛光机用空气静压主轴刚度、承载力等静态性能的提升,基于抛光过程中主轴的实际受力状态,采用数值模拟与实验验证的方式,对静压主轴的静态特性进行研究,研制了用于抛光机的空气静压主轴,并开展了轴承的静态性能测试实验,完成了静压轴承数值模拟结果的实验验证。实验结果表明,实验测试与数值求解结果具有一致性,两者误差在10%以内。设计的的空气静压轴承止推刚度与径向刚度分别为333 N/μm和120 N/μm,承载力分别为2024 N和704 N,为保证抛光加工质量提供了良好的条件。Aerostatic spindle is the core basic component of polishing machine.In order to improve the stiffness and bearing capacity of the aerostatic spindle for diamond tools polishing machine,based on the actual stress state of the spindle in the polishing process,the static characteristics of the aerostatic spindle are studied by means of numerical simulation and experimental verification,the aerostatic spindle for polishing machine is developed,the static performance test experiment of the bearing is carried out,and the experimental verification of the numerical simulation results of the hydrostatic bearing is completed.The experimental results show that the experimental results are consistent with the numerical results,and the error between them is less than 10%.The thrust stiffness and radial stiffness of aerostatic bearing are 333 N/μm and 120 N/μm.The bearing capacity is 2024 N and 704 N respectively,which provides good conditions for ensuring the polishing quality.

关 键 词：空气静压轴承 金刚石刀具抛光机 止推轴承 径向轴承 

分 类 号：TH16[机械工程—机械制造及自动化] TG659[金属学及工艺—金属切削加工及机床]