印制电路板集成螺线管型磁芯电感的制作  

Fabrication of integrated solenoid core inductors on printed circuits board

作　　者：高奇 周国云 何为 朱永康 陈先明 GAO Qi;ZHOU Guoyun;HE Wei;ZHU Yongkang;CHEN Xianming(School of Materials and Energy,University of Electronic Science and Technology of China,Chengdu 610054,China;Jiangxi Institute of Electronic Circuits,Pingxiang 337006,Jiangxi Province,China;Netron Soft-Tech(Zhuhai)Co.,Ltd.,Zhuhai 519175,Guangdong Province,China;Zhuhai ACCESS Semiconductor Co.,Ltd.,Zhuhai 519175,Guangdong Province,China)

机构地区：[1]电子科技大学材料与能源学院,四川成都610054 [2]江西电子电路研究中心,江西萍乡337006 [3]奈电软性科技电子(珠海)有限公司,广东珠海519175 [4]珠海越亚半导体股份有限公司,广东珠海519175

出　　处：《电子元件与材料》2022年第12期1346-1350,共5页Electronic Components And Materials

基　　金：国家自然科学基金(61904026);珠海市创新团队项目(ZH0405190005PWC);珠海市科技项目(ZH01084702180040HJL)。

摘　　要：为了满足未来移动设备对电路系统高性能、微型化的需求,研究了集成式电压调节器中使用的集成式磁芯电感的制作问题。将磁性粉末与环氧树脂混合制备复合磁性材料作为集成式磁芯电感的磁芯材料,通过丝网印刷工艺沉积磁芯层,采用先进印制电路板制作工艺制备出高感值密度、高品质因子的集成式螺线管型磁芯电感。该集成式螺线管型磁芯电感基于垂直实心铜柱互联形成绕组,展现出优异的性能。并经过一系列的表征证明了其制作工艺的可靠性与创新性,非常适用于板级封装的电源管理模块。最终对其电感性能进行测量,在100 MHz时其单位面积电感密度达到7.35 nH/mm^(2),品质因子Q达到42.7。In order to meet the demand for high performance and miniaturization ofthe circuit systems for future mobile devices,this paper investigates the fabrication of integrated core inductors used in integrated voltage regulator.By mixing the magnetic powder with the epoxy resin to produce a composite magnetic material as the core material of the integrated core inductor,the core layer was deposited by screen printing and the advanced printed circuit board fabrication process,and an integrated solenoid type core inductor with high inductance density and high quality factor was fabicated.The integrated solenoid core inductor was based on interconnected vertical solid copper pillars to form the windings and it exhibited excellent performance.A series of characterizations demonstrated the reliability and innovation of the manufacturing process for board-level packaged power management module.The inductance density of 7.35 nH/mm^(2)and a quality factor Q of 42.7 at 100 MHz were realized.

关 键 词：集成式电压调节器 集成式磁芯电感 磁性材料 印制电路板 

分 类 号：TM552[电气工程—电器]