垂直腔面发射激光器阵列光束的空间传输特性  

Beam Space Propagation Characteristics of Vertical Cavity Surface Emitting Laser Arrays

作　　者：朱子军 刘玉东 惠武 王丙辛 张峰[1] 关宝璐[1] ZHU Zijun;LIU Yudong;HUI Wu;WANG Bingxin;ZHANG Feng;GUAN Baolu(Laboratory of Opto-electronics Technology,Faculty of Information Technology,Beijing University of Technology,Beijing 100124,China)

机构地区：[1]北京工业大学光电子技术教育部重点实验室,北京100124

出　　处：《光子学报》2022年第12期48-55,共8页Acta Photonica Sinica

基　　金：国家自然科学基金(Nos.60908012,61575008,61775007);北京市自然科学基金(No.4172011);北京市教育委员会基金(Nos.040000546319525,040000546618006)。

摘　　要：针对垂直腔面发射激光器阵列光束空间相干特性及其光场分布开展理论分析和实验研究。垂直腔面发射激光器阵列光束为部分相干光,在不同激励电流下,远场光斑分别表现出类高斯和类拉盖尔-高斯两种光场分布,光束空间相干度随注入电流的增大而减小。进一步实验表明,与标准相干光源相比,在类湍流大气散射媒介中传输时,垂直腔面发射激光器阵列光束具有更小光斑扩散和更低光强衰减。随着垂直腔面发射激光器阵列光束空间相干度由0.695降低为0.608,其传输时的光斑扩展率由8.6%减小为3.4%,光强衰减率由24.9%降低为15%,空间相干度较低的垂直腔面发射激光器阵列光束表现出更好的传输特性,这对垂直腔面发射激光器阵列光源在自由空间雷达探测和光通信等领域的应用有重要指导意义。Vertical Cavity Surface Emitting Laser(VCSEL)array has the advantages of high integration,high modulation bandwidth,high output power,fast response and individual addressing,so it is widely used in parallel optical interconnection,3D recognition and sensing,high resolution printing and other fields.With the development of science and technology,the quality of laser array light source is required to be higher.For example,in order to suppress the speckle phenomenon and realize confocal microinterference detection with high spatial resolution and high contrast,the VCSEL array light source is required to have flat top beam output with low spatial coherence.In the optical capture and microoperation of biological cells,in order to produce an optical trapping array effect,the beam of the VCSEL array needs to be regulated into Laguerre-Gaussian hollow circular distribution.The beam distribution and spatial coherence of VCSEL and its array have attracted more and more attention.Similarly,in free-space optical communication,the laser beam distribution and spatial coherence are closely related to the disturbance effects such as beam broadening,spot drift and intensity scintillation transmitted in a turbulent atmospheric scattering medium.It is of great significance to research the spatial coherence and light field distribution of array light source to optimize their transmission characteristics.In this paper,the spectrum of the VCSEL array is measured and the light field distribution of the VCSEL array is researched.At the threshold current,the VCSEL array is emitted as the fundamental mode,and the energy of the fundamental mode beam is distributed in the center of the luminous aperture and the light spot divergence degree is small.At this time,the far field of the array is a circular light spot formed by the superposition of the light beams of each luminous unit,and the light field is Gaussian distribution.With the increase of injection current,the high-order mode of the VCSEL array beam gradually appears.Because the energ

关 键 词：垂直腔面发射激光器 阵列光源 空间相干性 部分相干光 传输特性 

分 类 号：TN248.4[电子电信—物理电子学]