基于游标效应的温度不敏感光纤拉力传感器  

Temperature-insensitive Optical Fiber Tension Sensor Based on Vernier Effect

作　　者：郭云 陈圣林[2] 王平 魏翔宇 王玉娟 王善平 万海城 GUO Yun;CHEN Shenglin;WANG Ping;WEI Xiangyu;WANG Yujuan;WANG Shanping;WAN Haicheng(School of Electrical Engineering,Shandong Huayu Institute of Technology,Dezhou,Shandong 253000,China;Department of Electronics and New Energy Technology Engineering,Texas Vocational and Technical College,Dezhou,Shandong 253000,China)

机构地区：[1]山东华宇工学院电气工程学院,山东德州253000 [2]德州职业技术学院电子与新能源技术工程系,山东德州253000

出　　处：《光子学报》2022年第12期123-134,共12页Acta Photonica Sinica

基　　金：电气工程与智能控制协同创新中心(经费资助)。

摘　　要：提出了一种基于光学游标效应的并联法布里-珀罗干涉仪,实现了高灵敏度的光纤拉力传感。为实现高质量的游标效应,该传感器由两个法布里-珀罗干涉仪并联组成,分别为传感干涉仪和参考干涉仪,在此基础上,采用光纤衰减器来精确调控参考干涉仪的插入损耗,便于波长和强度之间的完美匹配。实验结果显示,并联后的拉力灵敏度达到了63.5 nm/N,线性度为99.26%,与单一传感干涉仪相比灵敏度提高了15.8倍。同时,温度串扰仅为9.8×10^(-4)N/°C。该传感器具备制作简单、灵敏度高、机械强度高、体积小以及成本低等优点,为恶劣条件下拉力测量提供了应用参考。Based on distributed fiber optic sensors, fiber grating sensors and fiber interferometers have been widely used in tensile force measurement. In contrast, fiber interferometers have been widely studied due to their high sensitivity, such as Mach-Zehnder Interferometers(MZI), Fabry-Perot Interferometers(FPI), and Sagnac Interferometers(SI). On this basis, in order to improve the tensile force sensitivity of fiber interferometers, cascade fiber interferometers based on Vernier effect are proposed, such as cascaded dual MZI, cascaded dual FPI and cascaded MZI-FPI structures. However, the matching of the optical path difference and insertion loss of the cascade structure has always been a difficult problem to solve, which can affect the spectral quality of the Vernier effect. Therefore, the sensing accuracy and resolution of the tensile force measurements are limited. In this paper, a parallel FPI all-fiber tensile force sensor based on the Vernier effect is proposed, which is composed of a Sensing FPI(SFPI) and a Reference FPI(RFPI) in parallel. The structure is prepared only by an arc discharge technology, which ensures the uniformity and repeatability of the structure preparation. Among them, the SFPI is a closed air cavity. The tapered air microcavity is fabricated by precisely controlling the discharge position of HCF by an optical fiber fusion splicer. Then, the tapered air microcavity is discharged multiple times with a small current to improve the reflectivity of the microcavity. RFPI is an open air cavity. A section of HCF and Single-Mode Fiber(SMF) with an inner diameter of 80 μm is directly fused, and the length of the HCF cavity is precisely controlled by a precision cutting platform, so that the FSR of the interference spectrum is consistent with the SFPI. Subsequently, a section of HCF with an inner diameter of 10 μm is splicing on the end face.The parallel structure only consists of SMF and HCF, and the thermal expansion coefficient and thermo-optic coefficient of silica and air are very small, which

关 键 词：法布里-珀罗 并联 拉力 游标效应 高灵敏度 光纤衰减器 

分 类 号：TN253[电子电信—物理电子学]