氮化镓基异质结构光子晶体微腔特性研究  

Study on the characteristics of Gallium Nitride based hetero-structure photonic crystal micro-cavity

作　　者：沈威 徐许 高宏伟[2] 刘启发[1] SHEN Wei;XU Xu;GAO Hongwei;LIU Qifa(College of Telecommunication and Information Engineering,Nanjing University of Posts and Telecommunications,Nanjing 210003,China;Key Laboratory of Nano devices and Applications,Suzhou Institute of Nano-Tech and Nano-Bionics,Chinese Academy of Sciences,Suzhou 215123,China)

机构地区：[1]南京邮电大学通信与信息工程学院,江苏南京210003 [2]中国科学院苏州纳米技术与纳米仿生研究所,江苏苏州215123

出　　处：《光学精密工程》2022年第24期3097-3104,共8页Optics and Precision Engineering

基　　金：信息光子学与光通信国家重点实验室(北京邮电大学)开放基金资助项目(No.IPOC2021B03);国家留学基金资助项目(No.201908320061);中国博士后科学基金资助项目(No.2018M640507);南京邮电大学研究基金资助项目(No.NY218046)。

摘　　要：本论文提出了氮化镓基有源体系的异质结构光子晶体谐振腔,以实现高品质因子和小模场体积的有源集成蓝光谐振。通过能带分析,明确了异质结构光子晶体谐振腔的工作机理。基于光子晶体的能带带边和带隙原理,实现了光子面内反馈、高品质因子谐振和面外垂直发射。基于时域有限差分方法,研究了核心区和包层区不同谐振腔参数下的谐振特性。讨论了微腔结构与谐振品质因子、腔损耗、谐振频率及模场体积等的影响关系。研究表明,通过异质结构可以有效地降低面内谐振损耗,实现了有源集成型蓝光波段的Purcell因子达到769,模场体积为0.7(λ/n)3。该研究为蓝光波段高Q/Vm谐振腔的设计开辟了道路,同时为具备优异谐振特性的异质结构光子晶体微腔的研究奠定了方法和理论基础。This paper proposes a two-dimensional heterostructure photonic crystal on a GaN-based active platform for achieving a resonant microcavity in the blue band with a high quality(Q)factor and small mode volume(Vm). The working mechanism of the heterostructure photonic crystal resonator is explained through band structure analysis. Based on the band edge and band gap principles applicable to photonic crystals,photonic in-plane feedback,a high Q factor resonance,and out-of-plane vertical emission are realized. The resonance characteristics of the core and cladding regions using different cavity parameters are studied by finite difference time domain(FDTD)simulation. The relationships among the microcavity structure and the resonance Q factor,cavity loss,resonance frequency,and Vmare discussed. These findings pave the way for designing high-Q/Vmresonators in the blue band and establishing a method with a theoretical basis for studying heterostructure photonic crystal microcavities with excellent resonance characteristics.

关 键 词：异质结构光子晶体微腔 有限时域差分 品质因子 模场体积 面内反馈 

分 类 号：TN256[电子电信—物理电子学] TN36