氧气传感器加热器制备工艺研究  

Research on the Preparation Process of Oxygen Sensor Heator

作　　者：张志强 黄林然 赵振平 鲁耀 李哲辉 ZHANG Zhiqiang;HUANG Linran;ZHAO Zhenping;LU Yao;LI Zhehui(AVIC Shanghai Aero Measurement Controlling Research Institute,Shanghai 201601,China;Aviation Key Laboratory of Science and Technology on Fault Diagnosis and Health Management,Shanghai 201601,China)

机构地区：[1]航空工业上海航空测控技术研究所,上海201601 [2]故障诊断与健康管理技术航空科技重点实验室,上海201601

出　　处：《传感器世界》2022年第11期7-11,共5页Sensor World

摘　　要：氧化锆氧气传感器工作温度为700℃,加热器为传感器提供热量,是保证传感器稳定工作的基础。丝网印刷下浆料量是决定加热器铂电阻层厚度的关键因素,直接影响加热器印刷质量及电阻值。文章通过检测传感器加热器印刷前后PET膜湿重、干重的变化,研究了丝网参数和刮刀参数对加热器印刷的具体影响方式,得到了丝网目数、掩膜版厚度、线宽三个丝网参数,以及刮刀压力和刮刀行程这两项刮刀参数对印刷下浆料量的影响规律,为加热器电阻值精确控制及稳定制备提供了可靠依据。The operating temperature of zirconia oxygen sensor is 700℃, and the heater that provides heat to the sensor is the basis to ensure the stable operation of the sensor. The ink throughput of screen printing is the key factor to determine the thickness of platinum resistor, which directly affects the printing quality. By detecting the changes of wet weight and dry weight of PET film before and after printing, the specific influence of screen parameters and scraper parameters on heater printing is researched in the paper. And the effects of mesh count, mask thickness, line width, scraper pressure and scraper stroke on the amount of ink throughput were obtained, which provided a reliable basis for heater resistance control and stable preparation.

关 键 词：加热器 丝网印刷 下浆料量 刮刀参数 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]