新型MEMS压电矢量水听器  

A novel MEMS piezoelectric vector hydrophone

作　　者：樊青青 李俊红[1] 翟禹光 马军[1] FAN Qingqing;LI Junhong;ZHAI Yuguang;MA Jun(Institute of Acoustics,Chinese Academy of Sciences,Beijing 100190)

机构地区：[1]中国科学院声学研究所,北京100190

出　　处：《声学学报》2023年第1期102-111,共10页Acta Acustica

基　　金：国家自然科学基金项目(11874388,12174420);中国科学院声学研究所自主部署“前沿探索”类项目(QYTS202002)、中国科学院声学研究所自主部署“目标导向”类项目(MBDX202112)资助。

摘　　要：对一种具有U形槽或双U形槽结构的MEMS压电式矢量水听器进行了仿真分析与优化,采用微机械加工技术研制出水听器芯片,并对芯片进行了封装与性能测试。提出了理论灵敏度和能量综合分析的方法,在考虑杂散电容的情况下,对敏感结构进行了更加精确的优化。从实验结果可以看出,所提出的优化方法比仅考虑理论灵敏度的传统优化方法具有更高的准确度。此外,具有双U形槽结构的矢量水听器的灵敏度比传统的单臂悬臂梁结构的灵敏度高约5.9 dB,并且具有良好的指向性。The simulation analysis and optimization of a MEMS(Micro-Electro-Mechanical System) piezoelectric vector hydrophone with U-groove or double U-groove are carried out in this paper.The hydrophone chip is prepared by micromachining technology.Finally,the prepared chip is packaged and tested.The comprehensive analysis of the theoretical sensitivity and energy is proposed to permit the accurate structure optimization by considering the impact of stray capacitance.From the acquired experiment results,it is divulged that the employed optimization method exhibits a higher accuracy than the traditional optimization approach,which takes into account only the theoretical sensitivity.On top of that,the sensitivity of the proposed double U-groove structure is about 5.9 dB higher than that of the single cantilever structure,and it has good directivity.

关 键 词：微机械加工技术 杂散电容 矢量水听器 敏感结构 悬臂梁结构 灵敏度比 压电式 U形槽 

分 类 号：TB565.1[交通运输工程—水声工程]