单晶金纳米真空隧道结的超快电子发射研究  

Ultrafast Electron Emission Based on Single-Crystal Gold Vacuum Tunneling Nanojunction

作　　者：刘海洋 宋轶环 周圣涵 陈科 李振军[1,3] 李驰 LIU Hai-yang;SONG Yi-huan;ZHOU Sheng-han;CHEN Ke;LI Zhen-jun;LI Chi(National Center for Nanoscience and Technology,CAS Key Laboratory of Nanophotonic Materials and Devices,Beijing 100190,China;Centre of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China;GBA Research Innovation Institute for Nanotechnology,Guangzhou 510700,China;Henan Institute of Advanced Technology,Zhengzhou University,Zhengzhou 450001,China)

机构地区：[1]国家纳米科学中心中国科学院纳米光子材料与器件重点实验室(筹),北京100190 [2]中国科学院大学材料与光电研究中心,北京100049 [3]广东粤港澳大湾区国家纳米科技创新研究院,广东广州510700 [4]郑州大学河南先进技术研究院,河南郑州450001

出　　处：《真空电子技术》2022年第6期36-42,共7页Vacuum Electronics

基　　金：国家重点研发计划(2021YFC2802000);国家自然科学基金(51972072,52072084,52222207,51925203);广东省重点领域研发计划项目(2020B0101020002);广东粤港澳大湾区国家纳米科技创新研究院自主立项项目(2020GN0106);中国科学院战略性先导科技专项(B类)(XDB36000000)。

摘　　要：超快脉冲激光激发的纳米真空器件能够同时实现高频率和低功耗,并且有望将电子器件响应时间推进至飞秒甚至阿秒量级,从而进一步提高器件的工作频率,是未来高频电子器件的重要技术路线。本文利用原子级平整的单晶金设计并制备了一种基于领结型(bowtie)纳米隧道结的新型电子隧穿器件。重点研究了器件静态和超快激光激发的电子发射性能,利用模拟计算研究了bowtie结构对电子发射性能的影响,深入分析了器件的光电子发射机制,实现了具有四次幂的高非线性多光子发射电流,有望实现新型超快纳米真空电子器件。Ultrafast pulsed laser-driven nanometer vacuum device can achieve high frequency and low power consumption at the same time,and is expected to promote the electronic device response time to femtosecond or even attosecond level,so as to further improve the operating frequency of devices,which is an important technical route for future high-frequency electronic devices.A novel electron tunneling device based on bowtie tunneling nanojunction is designed and fabricated using atomically flat single-crystal gold.The research is mainly focused on the static and ultrafast laser excitation electron emission performance of the device.The effect of the bowtie structure on electron emission properties is studied by simulation calculation.The photoemission mechanism of the device is deeply explored,and high nonlinear multiphoton emission currents of the 4th power are realized,which are expected to achieve the novel ultrafast nanometer vacuum electronic device.

关 键 词：电子隧穿器件 纳米真空隧道结 超快光激发 多光子发射 单晶金 

分 类 号：TN15[电子电信—物理电子学] TN102