全氟弹性体密封件在半导体工业中的选择和应用  

Selection and Application of Perfluoroelastomer Seals in Semiconductor Industry

作　　者：罗生乔 窦若岸 赖碧红 LUO Shengqiao;DOU Ruoan;LAI Bihong(China Bluestar Chengrand Research and Design Institute of Chemical Industry Co.,Ltd.,Chengdu 611041,China)

机构地区：[1]中蓝晨光化工研究设计院有限公司,四川成都611041

出　　处：《有机氟工业》2022年第4期58-64,共7页Organo-Fluorine Industry

摘　　要：全氟弹性体(FFKM)具有优异的耐介质、耐热和力学性能,是一种出色的密封材料。但由于其复杂的生产和加工工艺,成本高昂,仅应用于尖端领域,例如半导体加工业就是一个典型应用。分析了半导体制造业对密封件的要求,并列举了半导体用FFKM密封件主要的生产商、牌号及其性能和应用。Perfluoroelastomer(FFKM)is a high performance sealing material with extraordinary chemical resistance,heat resistance and mechanical strength.However,because of its complicated manufacturing technique and high cost,it is usually used in the cutting-edge fields,such as semiconductor industry.This paper analyzes the requirements of seals in semiconductor manufacturing industry,and lists the main manufacturers,brands,characteristics and application of FFKM seals for semiconductor.

关 键 词：FFKM 半导体工业 选用指南 

分 类 号：TQ334[化学工程—橡胶工业] TN30[电子电信—物理电子学]