Planarized THz quantum cascade lasers for broadband coherent photonics  

作　　者：Urban Senica Andres Forrer Tudor Olariu Paolo Micheletti Sara Cibella Guido Torrioli Mattias Beck Jerome Faist Giacomo Scalari 

机构地区：[1]Quantum Optoelectronics Group,Institute of Quantum Electronics,ETH Zurich,8093 Zürich,Switzerland [2]Istituto di Fotonica e Nanotecnologie,CNR,Via del Fosso del Cavaliere 100,00133 Rome,Italy

出　　处：《Light(Science & Applications)》2022年第12期3098-3108,共11页光（科学与应用)（英文版）

基　　金：funding from the ERC Grant CHIC(No.724344);in part by the NATO Science for Peace and Security Programme under grant G5721 THESEUs;Actphast 4 Researchers P2020-41 for financial support.

摘　　要：Recently,there has been a growing interest in integrated THz photonics for various applications in communications,spectroscopy and sensing.We present a new integrated photonic platform based on active and passive elements integrated in a double-metal,high-confinement waveguide layout planarized with a low-loss polymer.An extended top metallization keeps waveguide losses low while improving dispersion,thermal and RF properties,as it enables to decouple the design of THz and microwave cavities.Free-running on-chip quantum cascade laser combs spanning 800 GHz,harmonic states with over 1.1 THz bandwidth and RF-injected broadband incoherent states spanning over nearly 1.6 THz are observed using a homogeneous quantum-cascade active core.With a strong external RF drive,actively mode-locked pulses as short as 4.4 ps can be produced,as measured by SWIFTS.We demonstrate as well passive waveguides with low insertion loss,enabling the tuning of the laser cavity boundary conditions and the cointegration of active and passive elements on the same THz photonic chip.

关 键 词：WAVEGUIDE PASSIVE tuning 

分 类 号：TN248[电子电信—物理电子学]