脉冲电压对内花键齿Si-DLC薄膜微观结构及性能的影响  

Effects of Pulse Voltage on Microstructure and Properties for Si-DLC Films on Internal Spline Tooth

作　　者：徐天杨 詹华[1,2] 张艳静 吴佳亿 汪瑞军 XU Tianyang;ZHAN Hua;ZHANG Yanjing;WU Jiayi;WANG;Ruijun(Chinese Academy of Agricultural Mechanization Sciences,Beijing 100083,China;State Key Lab of Advanced Welding and Joining,Harbin Institute of Technology,Harbin 150001,China;Beijing Golden Wheel Special Machine Co.,Ltd,Beijing 100083,China)

机构地区：[1]中国农业机械化科学研究院,北京100083 [2]哈尔滨工业大学先进焊接与连接国家重点实验室,哈尔滨150001 [3]北京金轮坤天特种机械有限公司,北京100083

出　　处：《中国表面工程》2022年第6期257-265,共9页China Surface Engineering

基　　金：进焊接与连接国家重点实验室开放课题研究基金资助项目(AWJ-21M14)。

摘　　要：为提高花键齿表面硬度和耐磨性,利用空心阴极放电(HCD)产生的高密度等离子体,在内花键齿表面,采用等离子体增强化学气相沉积(PECVD)技术制备Si-DLC薄膜,并研究脉冲电压变化对花键齿表面Si-DLC薄膜微观结构及性能的影响。结果表明:拉曼光谱显示增加脉冲电压可以减少Si-DLC薄膜中的sp^(3)杂化键含量。随着脉冲电压增加,键齿表面Si-DLC薄膜厚度和沉积速率先增加后降低,在脉冲电压为-1100 V时达到最大。在相同的脉冲电压条件下,花键齿顶处Si-DLC薄膜的厚度最大,齿中处Si-DLC薄膜厚度最小。Si-DLC薄膜的显微硬度随着脉冲电压的升高逐渐降低,硬度可达800~1300 HV0.025。Si-DLC薄膜能显著降低花键齿的摩擦因数,且脉冲电压为-900 V时,制备的Si-DLC薄膜有着最优的减摩效果,沿花键齿廓方向上的Si-DLC薄膜的摩擦因数均小于0.1。Si-DLC薄膜的制备提高了花键齿表面的硬度和耐磨性,为其他机械传动部件表面耐磨薄膜的制备奠定了基础。To improve the hardness and wear resistance of spline tooth,Si-DLC films are prepared on internal spline tooth by plasma enhanced chemical vapor deposition(PECVD),utilizing high-density hollow cathode discharge(HCD)plasma.Microstructure and properties of Si-DLC films coated internal spline tooth are analyzed,which utilizes plasma ignited by various pulse voltage.Raman spectra results show that the increase of pulse voltage could reduce the content of sp^(3)hybrid in Si-DLC films.The film's thickness and deposition rate increase first and then decrease with the increasing pulse voltage,both reach the highest value at-110o V.Si-DLC films on tooth top and tooth middle,which deposited by the same pulse voltage,have the highest and least thickness,respectively.The microhardness of Si-DLC films decreases with increasing pulse voltage,which is in the range of 800-1300HVo.025.Si-DLC films can decline the friction coefficient of spline tooth dramatically,and Si-DLC films deposited with a pulse voltage of-90o V has the most optimized friction-reduction effect,which friction coefficient of Si-DLC films along tooth profile are less than 0.1.Si-DLC films enhance the hardness and wear resistance of spline,which provides the basis of wear-resistant coatings preparation for other mechanical transition parts.

关 键 词：内花键齿 Si-DLC薄膜 力学性能 摩擦学性能 

分 类 号：TG156[金属学及工艺—热处理] TB114[金属学及工艺—金属学]