基于硒化锌基底激光合束镜的研究  

Research on Laser Beam Combiner Based on Zinc Selenide Substrate

作　　者：檀承启 谢欣 张守立 孙宏宇[1] 程伟宁 TAN Chengqi;XIE Xin;ZHANG Shouli;SUN Hongyu;CHENG Weining(Academy of Opto-Electronics,China Electronics Technology Group Corporation(AOE CETC),Tianjin,China;The Third Military Representative Office in Tianjin of The Air Force Equipment Department,Tianjin,China)

机构地区：[1]中国电子科技集团公司光电研究院,天津 [2]空军装备部驻天津地区第三军事代表室,天津

出　　处：《光电技术应用》2022年第6期13-17,37,共6页Electro-Optic Technology Application

摘　　要：为了满足精简多波段激光设备光路的技术需求,选取ZnS、YbF3两种材料,在ZnSe基底上完成了45°入射条件下长、短波红外合束镜的设计。引入修正系数,结合误差分析,解决了测量光谱与设计曲线不吻合的问题。最终制备的合束镜在入射角为45°时,在λ=(10.6±0.2)μm波段透过率>95%,在λ=(780±10)nm、(808±10)nm、(880±10)nm、(915±10)nm波段反射率>97%,在λ=630~680 nm波段的透过率约为41.825%。所制备的合束镜具有良好的环境适应性,满足系统的技术需求。In order to meet the technical requirements of simplifying the laser optical path of multi-band laser equipment,two materials such as ZnS and YbF3are selected to complete the design of long-wave and short-wave infrared beam combiners under the condition of 45°incident on the ZnSe substrate.The correction coefficient is introduced,and the measurement spectrum is analyzed.The reason for the inconsistency with the design curve,and the error is solved in combination.When the incident angle of the final beam combiner is 45°,the transmittance in the(10.6±0.2)μm band is more than 95%,and the reflectivity in the(780±10)nm,(808±10)nm,(880±10)nm,(915±10)nm bands is more than 97%,the transmittance in the 630~680 nm band is about 41.825%.The prepared beam combiner has good environmental adaptability and meets the technical requirements of the system.

关 键 词：光学薄膜 合束镜 分光膜 硒化锌 

分 类 号：O484[理学—固体物理]