硒化锌基底多波段红外增透膜的研究  

Study of Multi-band Infrared Antireflection Coatings on Zinc Selenide Substrate

作　　者：陈星聿 关冉昀 张守立 孙宏宇[1] 程伟宁 CHEN Xingyu;GUAN Ranyun;ZHANG Shouli;SUN Hongyu;CHENG Weining(Academy of Opto-Electronics,China Electronics Technology Group Corporation(AOE CETC),Tianjin,China)

机构地区：[1]中国电子科技集团公司光电研究院,天津

出　　处：《光电技术应用》2022年第6期18-21,106,共5页Electro-Optic Technology Application

摘　　要：为了满足光电设备窗口片的使用要求,设计了一种以硒化锌为基底的多波段红外增透膜。为了达到多波段增透的目的,选取硫化锌、氟化镱分别作为高、低折射率材料,在硒化锌基底前后表面镀制相同的多波段红外增透膜。最终实现0.808μm、0.880μm、0.915μm处透过率在91%以上,3.7~4.8μm和10.6μm处透过率在95%以上,并且膜层具有良好耐环境适应性。In order to meet the requirements of optoelectronic devices for the use of windows,a multi-band infrared antireflection coating based on zinc selenide is designed.In order to achieve the purpose of multi-band antireflection,zinc sulfide and ytterbium fluoride are selected as high and low refractive index materials respectively,and the same multi-band infrared anti-reflection film is coated on the front and rear surfaces.Finally,the transmittance at 0.808μm,0.880μm,and 0.915μm is more than 91%,and the transmittance at 3.7~4.8μm and 10.6μm is more than 95%,and the film layer has good environmental adaptability.

关 键 词：光学薄膜 红外增透膜 多波段 硒化锌 

分 类 号：O484[理学—固体物理]