基于金刚石量子色心的温度磁场同步测量技术  

Synchronous Measurement Technique of Temperature and Magnetic Field with Diamond Quantum Color Centers

作　　者：王曹 刘启慧 程建功[1,2] 陈浩 武震宇 Wang Cao;Liu Qihui;Cheng Jiangong;Chen Hao;Wu Zhenyu(State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China;University of Chinese Academy of Sciences,Beijing 100049,China;School of Microelectronics,Shanghai University,Shanghai 200444,China;Shanghai IndustrialμTechnology Research Institute,Shanghai 201800,China)

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海200050 [2]中国科学院大学,北京100049 [3]上海大学微电子学院,上海200444 [4]上海微技术工业研究院,上海201800

出　　处：《微纳电子技术》2022年第11期1226-1233,1241,共9页Micronanoelectronic Technology

基　　金：中国科学院战略性先导科技专项(XDC07030200);中国科学院科研仪器装备研制项目(YJKYYQ20190026);国家重点研发计划(2021YFB3202500)。

摘　　要：金刚石中的氮空位(NV)色心具有极佳的量子性质,并且对温度和磁场敏感,为温度与磁场的精密测量提供了新的解决方案。提出一种基于金刚石NV色心的温度和磁场同步测量方法。NV色心自旋塞曼劈裂能级随温度同向移动、随磁场反向移动。通过对劈裂能级同时进行光探测磁共振探测,并结合频率调制解调技术,实现了对温度和磁场的同步测量。自旋双共振系统的3 d B带宽为1 k Hz。在激光功率400 m W、自旋劈裂能级对的驱动微波功率分别为30 d Bm和35 d Bm时,温度灵敏度和磁灵敏度分别约为0.4mK/√Hz和1.1nT/√Hz。温度测量对磁场的隔离度约10 d B。该技术为大动态范围温度与磁场的同步测量提供了解决方案。Nitrogen-vacancy(NV)color centers in diamond have excellent quantum properties and are sensitive to temperature and magnetic field,providing a new solution for precision measurement of temperature and magnetic field.A method of simultaneous measurement of magnetic field and temperature based on NV color centers in diamond was proposed.The spin Zeeman splitting levels of NV color center shift in the same direction with temperature and in the opposite direction with magnetic field.The temperature and magnetic field can be measured simultaneously by means of optically detected magnetic resonance of splitting level with modulation and demodulation techniques.The spin dual-resonance system has a 3 d Bbandwidth of 1 k Hz.With a laser power of 400 m Wand the microwave powers of 30 d Bm and 35 d Bm to drive the opposite spin flips,the temperature sensitivity and magnetic sensitivity are 0.4mK/√Hz and 1.1nT/√Hz,respectively.The isolation factor of the temperature measured as the magnetic field is around 10 d B.This technique provides a solution for synchronous measurement of temperature and magnetic field in large dynamic range.

关 键 词：量子传感 氮空位(NV)色心 温度测量 磁测量 自旋双共振 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置] TM936[自动化与计算机技术—控制科学与工程]