eFuse失效分析与可靠性电路设计  

Failure analysis of eFuse and reliability circuit design

作　　者：晏颖 曹玉升 张睿[2] Yan Ying;Cao Yusheng;Zhang Rui(Shanghai Feiju Microelectronic Corporation,Shanghai 201316,China;School of Micro-Nano Electronics,Zhejiang University,Hangzhou 310014,China)

机构地区：[1]上海飞聚微电子有限公司,上海201316 [2]浙江大学微纳电子学院,浙江杭州310014

出　　处：《电子技术应用》2023年第1期26-31,共6页Application of Electronic Technique

摘　　要：电编程熔丝(eFuse)基于电子迁移原理,通过熔断熔丝使其电阻特性发生不可逆改变来实现编程操作。提高可靠性是eFuse系统和电路优化设计的核心目标。从eFuse工作原理以及失效模式分析入手,重点介绍了影响其可靠性的系统原因和主要机理及过程,并在综合常规电路设计基础上,结合考虑各种工作模式下和具体模块中存在的影响可靠性的因素,最后提出了具有针对性的电路设计解决方案。Based on the principle of electron migration,eFuse realizes the programming operation by fusing the fuse to change its resistance characteristics irreversibly.High reliability is the core goal of eFuse system and circuit optimization design.This paper starts with the working principle and failure mode analysis of eFuse,and then focuses on the system causes and processes affecting its reliability.Based on the comprehensive conventional circuit design,combined with the factors affecting reliability in various working modes and specific modules,finally,a set of targeted circuit design solutions are proposed.

关 键 词：eFuse 可靠性 失效模式 电路设计 

分 类 号：TN406[电子电信—微电子学与固体电子学]