Large-scale programmable assembly of functional microcomponents for advanced electronics via light-regulated adhesion and polymer growth  

作　　者：Chan Guo Zhangxu Pan Changhao Li Shenghan Zou Chao Pang Jiantai Wang Jinhua Hu Zheng Gong 

机构地区：[1]Institute of Semiconductors,Guangdong Academy of Sciences,No.363 Changxing Road,Guangzhou 510650,China

出　　处：《npj Flexible Electronics》2022年第1期466-478,共13页npj-柔性电子（英文）

基　　金：The National Key Research and Development Program of China (No.2021YFB3600203);The Key-Area Research and Development Program of Guangdong Province (Grant No.2019B010925001,2020B010183001,and 2020B0101320002);The National Natural Science Foundation of China (Grant No.62104050 and 62104049);The China Postdoctoral Science Foundation (Grant No.2020M672551);The Guangdong Basic and Applied Basic Research Foundation (Grant No.2020B1515120020,2020A1515110509 and 2019A1515110682);The GDAS’Project of Science and Technology Development (Grant No.2019GDASYL-0103071).

摘　　要：Large-area,programmable assembly of diverse micro-objects onto arbitrary substrates is a fundamental yet challenging task.Herein a simple wafer-level micro-assembly technique based on the light-triggered change in both surface topography and interfacial adhesion of a soft photo-sensitive polymer is proposed.In particular,the light-regulated polymer growth creates locally indented and elevated zones on the stamp surface.The light-mediated adhesion reduction,on the other hand,facilitates the inks to be released from the polymer.The interplay of these two effects makes it feasible for the programmable assembly of ultra-small components onto various substrates coated with supplementary adhesive layers.The fidelity of this technique is validated by assembling diverse materials and functional devices,with the printing size up to 4-inch.This work provides a rational strategy for large-scale and programmable assembly of diverse delicate micro-objects,bypassing the common issues of some existing techniques such as poor transfer uniformity,small printing area,and high cost.

关 键 词：PRINTING ASSEMBLY RATIONAL 

分 类 号：TN304[电子电信—物理电子学]