High sensitivity and broad linearity range pressure sensor based on hierarchical in-situ filling porous structure  

作　　者：Jin Xu Huayang Li Yiming Yin Xin Li Jinwei Cao Hanfang Feng Wandi Bao Hao Tan Fanyuan Xiao Guang Zhu 

机构地区：[1]New Materials Institute,Department of Mechanical,Materials and Manufacturing Engineering,University of Nottingham Ningbo China,315100 Ningbo,China [2]CAS Key Laboratory of Magnetic Materials and Devices,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,315201 Ningbo,China [3]School of Nanoscience and Technology,University of Chinese Academy of Sciences,100049 Beijing,China [4]Ningbo Sezen Technology Co.,Ltd,315042 Ningbo,China [5]College of Mechanical and Electrical Engineering,Beijing University of Chemical Technology,100029 Beijing,China

出　　处：《npj Flexible Electronics》2022年第1期581-592,共12页npj-柔性电子（英文）

基　　金：supported by Ningbo Municipal 3315 Talent Scheme by Ningbo Science and Technology Bureau,the Zhejiang Provincial Natural Science Foundation of China (Grant LR19F010001).

摘　　要：Flexible piezoresistive pressure sensor with high sensitivity over a broad linearity range have been attracting tremendous attention for its applications in health monitoring,artificial intelligence,and human-machine interfaces.Herein,we report a hierarchical insitu filling porous piezoresistive sensor(HPPS)by direct ink writing(DIW)printing and curing of carbon nanofibers(CNFs)/polydimethylsiloxane(PDMS)emulsion.Hierarchical geometry significantly increases the contact area,distributes stress to multilayered lattice and internal porous structure,resulting in a broad sensing range.Moreover,unlike conventional hollow porous structure,the CNFs networks in-situ filling porous structure generates more contact sites and conductive pathways during compression,thereby achieving high sensitivity and linearity over entire sensing range.Therefore,the optimized HPPS achieves high sensitivity(4.7 kPa^(−1))and linearity(coefficient of determination,R^(2)=0.998)over a broad range(0.03-1000 kPa),together with remarkable response time and repeatability.Furthermore,the applications in diverse pressure scenarios and healthcare monitoring are demonstrated.

关 键 词：POROUS structure attracting 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]