光斑起始平面对飞秒激光加工SiC/SiC斜孔的影响  

The Effect of Initial Plane of Focal Spot in Femtosecond Laser Drilling of Inclined Holes on SiC/SiC Composite

作　　者：方菊 刘壮[1] 李元成 张晓兵 Fang Ju;Liu Zhuang;Li Yuancheng;Zhang Xiaobing(College of Mechanical and Electronic Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing,Jiangsu 210016,China;AVIC Manu facturing Technology Institute,Beijing 100024,China)

机构地区：[1]南京航空航天大学机电学院,江苏南京210016 [2]中国航空制造技术研究院,北京100024

出　　处：《应用激光》2022年第11期50-56,共7页Applied Laser

基　　金：国家科技重大专项(2017-VII-0015-0111)。

摘　　要：为了探究光斑起始平面对飞秒激光加工SiC/SiC复合材料斜孔的影响,采用环切法对厚度为4 mm的SiC/SiC厚板进行?1.5 mm斜孔加工试验,重点分析光斑起始平面对斜孔入口形貌、入口直径及锥度的影响。结果表明,光斑起始平面处于入口上沿导致加工深度增大,光束对孔内扫描时间增加,孔内材料去除量增多,导致入口孔径变大、锥度变小。对于斜孔加工,产物容易从入口下沿排出,从而造成入口下沿边缘有熔渣沉积现象。45°斜孔在入口下沿处出现崩边现象,其形成与加工产物喷射排出方向及强度有关。斜孔两侧侧壁斜度随斜孔角度的变化而变化。研究可为今后SiC/SiC复材飞秒激光高质量斜孔加工提供参考。This paper studied the effect of initial plane of focal spot in femtosecond laser drilling of inclined holes on SiC/SiC composite.A set of drilling experiments has been conducted on SiC/SiC specimen with 4 mm thickness and approximate?1.5 mm using beam concentric scanning mode.The effect of initial focal plane on entry size and hole taper have been analyzed.The results show that the entry size will be increased and hole taper will be decreased in case of initial focal plane is put at leading edge.This is because machining time was longer and greater volume material was removed,compared with a lower position of focal plane.For the drilling of inclined holes,the deposition of slag can be found at the lower edge of the entry because these slag is tend to be carried away from that area.In case of 45°inclined hole drilling,relatively large cracks can be found at the lower edge of the entry,this is because the exhaust intensity of the heat and slag is relatively high for large inclined hole machining.In addition,the taper angle of the two sides of the inclined hole is different with drilling angle.This study provides useful results for the future research of fs laser drilling of SiC/SiC.

关 键 词：飞秒激光 SIC/SIC复合材料 斜孔加工 光斑初始平面 

分 类 号：TB333[一般工业技术—材料科学与工程]