Localised solid-state nanopore fabrication via controlled breakdown using on-chip electrodes  

作　　者：Jasper P.Fried Jacob L.Swett Binoy Paulose Nadappuram Aleksandra Fedosyuk Alex Gee Ondrej E.Dyck James R.Yates Aleksandar P.Ivanov Joshua B.Edel Jan A.Mol 

机构地区：[1]Department of Materials,University of Oxford,Oxford,OX13PH,UK [2]School of Chemistry,University of New South Wales,Sydney,New South Wales 2052,Australia [3]Department of Chemistry,Imperial College London,London,W120BZ,UK [4]Center for Nanophase Materials Sciences,Oak Ridge National Laboratory,Oak Ridge,TN 37830,USA [5]Instituto de Tecnologia Química e Biológica António Xavier,Universidade Nova de Lisboa,Av.da República,Oeiras 2780-157,Portugal [6]School of Physics and Astronomy,Queen Mary University of London,London,E14NS,UK

出　　处：《Nano Research》2022年第11期9881-9889,共9页纳米研究（英文版）

基　　金：J.P.F.thanks the Oxford Australia Scholarship committee and the University of Western Australia for funding;J.R.Y.was funded by an FCT contract according to DL57/2016,[SFRH/BPD/80071/2011];J.R.Y.’s lab was funded by national funds through FCT-Fundação para a Ciência e a Tecnologia,I.P.,Project MOSTMICRO-ITQB with refs UIDB/04612/2020 and UIDP/04612/2020 and Project PTDC/NAN-MAT/31100/2017;J.M.was supported through the UKRI Future Leaders Fellowship,Grant No.MR/S032541/1;with in-kind support from the Royal Academy of Engineering.A.P.I.and J.B.E.acknowledge support from BBSRC grant BB/R022429/1,EPSCR grant EP/P011985/1;Analytical Chemistry Trust Fund grant 600322/05;This project has also received funding from the European Research Council(ERC)under the European Union’s Horizon 2020 research and innovation programme(Nos.724300 and 875525);O.D.and STEM investigations were supported by the Center for Nanophase Materials Sciences(CNMS);a U.S.Department of Energy,Office of Science User Facility.

摘　　要：Controlled breakdown has recently emerged as a highly accessible technique to fabricate solid-state nanopores.However,in its most common form,controlled breakdown creates a single nanopore at an arbitrary location in the membrane.Here,we introduce a new strategy whereby breakdown is performed by applying the electric field between an on-chip electrode and an electrolyte solution in contact with the opposite side of the membrane.We demonstrate two advantages of this method.First,we can independently fabricate multiple nanopores at given positions in the membrane by localising the applied field to the electrode.Second,we can create nanopores that are self-aligned with complementary nanoelectrodes by applying voltages to the on-chip electrodes to locally heat the membrane during controlled breakdown.This new controlled breakdown method provides a path towards the affordable,rapid,and automatable fabrication of arrays of nanopores self-aligned with complementary on-chip nanostructures.

关 键 词：solid-state nanopores dielectric breakdown nanofabrication single-molecule sensing nanopore arrays 

分 类 号：TB383[一般工业技术—材料科学与工程]