基于磁致旋光效应的双路MOEMS加速度传感方法  

Dual-Path MOEMS Acceleration Sensing Method Based on Magneto-Optical Rotation Effect

作　　者：刘丽双 武亮伟 郭浩 唐军 石云波 林绍卓 刘郁松 Liu Lishuang;Wu Liangwei;Guo Hao;Tang Jun;Shi Yunbo;Lin Shaozhuo;Liu Yusong(School of Instrument and Electronics,North University of China,Taiyuan 030051)

机构地区：[1]中北大学仪器与电子学院,太原030051

出　　处：《微纳电子技术》2022年第12期1308-1313,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(62175219,51635011)。

摘　　要：基于磁致旋光效应的加速度传感机理,提出了一种双路加速度传感方法。通过设置双路磁光晶体,利用其中一路磁光晶体敏感加速度信号引起的磁致旋光效应,另一路磁光晶体敏感外界的磁、热噪声并作为参考信号,通过对双路信号的同步差分检测,以去除外界磁、热噪声对磁光晶体的干扰。实验结果表明,基于磁致旋光效应的双路微光电子机械系统(MOEMS)加速度传感方法的灵敏度为314.3 mV/g,噪声谱密度为■,零偏不稳定性为29.1μg,表现出了较高的传感性能。相较于单路系统,双路差分检测有效去除了外界磁、热噪声的影响,提高了加速度传感的检测精度及应用范围。Based on the acceleration sensing mechanism of the magneto-optical rotation effect,a dual-path acceleration sensing method was proposed.By setting up dual-path magneto-optical crystals,one path of the magneto-optical crystal is used for the magneto-optical rotation effect caused by the sensitive acceleration signal,and the other path of the magneto-optical crystal is sensitive to the external magnetic and thermal noise and used as a reference signal.The interference of the external magnetic and thermal noise on the magneto-optical crystal is removed by synchronous differential detection of the dual-path signals.The experimental results show that the sensitivity of the dual-path micro-opto-electro-mechanical system(MOEMS) acceleration sensing method based on the magneto-optical rotation effect is 314.3 mV/g,the noise spectral density is ■,and the zero-bias instability is 29.1μg,indicating a high sensing performance.Compared with the single-path system,the dual-path differential detection effectively removes the influence of external magnetic and thermal noise and improves the detection accuracy and application range of acceleration sensing.

关 键 词：微光电子机械系统(MOEMS) 磁致旋光效应 磁光晶体 加速度传感 双路差分 

分 类 号：TH824.4[机械工程—仪器科学与技术]