基于CSRR的微波SIW高温温度传感器  

Microwave SIW High-Temperature Temperature Sensor Based on CSRR

作　　者：寇海荣 杨立波[1] 张小勇[1] 尚珍珍 史俊冰[1] Kou Hairong;Yang Libo;Zhang Xiaoyong;Shang Zhenzhen;Shi Junbing(Department of Intelligence and Automation,Taiyuan University,Taiyuan 030032,China)

机构地区：[1]太原学院智能与自动化系,太原030032

出　　处：《微纳电子技术》2022年第12期1330-1336,共7页Micronanoelectronic Technology

基　　金：山西省自然青年科学基金项目(202103021223005)。

摘　　要：针对航空航天、采矿冶金等高温领域对温度参数的测量需求,研制了一种基于互补开口谐振环(CSRR)结构的基片集成波导(SIW)型高温温度传感器。通过对该传感器的工作原理进行分析,并利用HFSS仿真软件进行建模优化,验证该传感器可用于温度检测的可行性,完成了高温温度传感器的设计。基于高温共烧陶瓷(HTCC)三维成型和丝网印刷工艺完成了传感器的制备。搭建高温温度测试平台,对传感器的性能进行了测试。该传感器可实现25~800℃内的温度检测,传感器在25~400℃低温内的温度灵敏度为33 kHz/℃,在400~800℃高温内的温度灵敏度为72.65 kHz/℃。Aiming at the measurement requirements of temperature parameters in high-temperature fields such as aerospace,mining and metallurgy,a substrate integrated waveguide(SIW) high-temperature temperature sensor based on complementary split resonant ring(CSRR) structure was developed.The working principle of the sensor was analyzed,and the HFSS simulation software was used for modeling and optimization to verify the feasibility of the sensor for tempe-rature detection,and the design of the high-temperature temperature sensor was completed.The fabrication of the sensor was completed based on the high temperature co-fired ceramic(HTCC) three-dimensional molding and screen printing process.A high-temperature temperature test platform was built to test the performance of the sensor.The sensor can realize temperature detection in the range of 25-800 ℃.The temperature sensitivity of the sensor in the low temperature range of 25-400 ℃ is 33 kHz/℃,and the temperature sensitivity in the high temperature range of 400-800 ℃ is 72.65 kHz/℃.

关 键 词：温度传感器 互补开口谐振环(CSRR) 基片集成波导(SIW) 高温共烧陶瓷(HTCC) 丝网印刷 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]