基于温补体声波谐振器件的耐高温型气相色谱检测器  

High temperature resistant gas chromatography detector based on temperature compensated bulk acoustic wave resonator

作　　者：胡继洲 屈贺幂[1] 庞慰[1] 段学欣[1] HU Jizhou;QU Hemi;PANG Wei;DUAN Xuexin(State Key Laboratory of Precision Testing Technology and Instruments,Tianjin University,Tianjin 300072,China)

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《分析试验室》2022年第11期1247-1251,共5页Chinese Journal of Analysis Laboratory

基　　金：国家重点研发计划(2018YFE0118700)项目资助。

摘　　要：结合气相色谱的高温检测对钻井过程中井下气体的检测具有重要意义。本文使用一种涂覆特定聚合物的温补薄膜体声波谐振器(FBAR),开发出一种对长链烷烃具有高灵敏度的微型检测器。同时实现低成本、兼容互补金属氧化物半导体(CMOS)制造工艺、微米级尺寸、低功耗以及大批量生产。聚合物薄膜的涂覆将FBAR的响应提升了超过一个数量级,该检测器能够在100℃以上的环境下工作且具有响应速度快、检出限低的特点,可用于油田气体分析。High temperature detection combined with gas chromatography is of great importance in downhole gas detection in drilling process.A miniaturized detector with high sensitivity for long-chain alkanes was proposed by introducing a temperature compensated film bulk acoustic wave resonator(FBAR)coated with specific polymer,which can achieve low-cost,CMOS-compatible fabrication process,micrometer-scale dimension,low power consumption and mass production,simultanously.Polymer thin film coating increased the FBAR response over one order of magnitude,and this detector can work at higher than 100℃.This chemical sensor with fast response and low detection limit can be used to the oil field gas analysis.

关 键 词：气相色谱 温度补偿 薄膜体声波谐振器 高温检测 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置]