全自动正压漏孔校准装置  

An automatic calibration apparatus of the pressure leak

作　　者：刘贝贝 刘燚 蒋厚庸 周宇仁 Liu Beibei;Liu Yi;Jiang Houyong;Zhou Yuren(Shanghai Institute of Measurement and Testing Technology)

机构地区：[1]上海市计量测试技术研究院

出　　处：《上海计量测试》2022年第5期32-34,共3页Shanghai Measurement and Testing

摘　　要：针对漏孔形状不一、受温度影响大、手动测量误差大的难题,建立了一套“基于活塞体积补偿、温度补偿”的全自动正压漏孔校准装置。通过体积连续和自动测量系统、半导体恒温系统、自动化控制与处理系统的合理设计,该装置可完成1×10^(-7)~1×10^(-5)Pa﹒m^(3)/s的正压漏孔漏率的量值溯源,装置不确定度为Urel=6%(k=2)。An automatic pressure leak calibration device was established based on piston volume compensation and temperature compensation to solve the problems of different leak shapes,large temperature influence and large manual measurement error.Through the reasonable design of continuous and automatic volume measurement system,semiconductor constant temperature system,automatic control and processing system,The device can complete the pressure leak value tracing of the leak rate 1×10^(-7)~1×10^(-5)Pa·m^(3)/s and the uncertainty of the device is Urel=6%(k=2).

关 键 词：正压漏孔 检漏 体积补偿 温度补偿 

分 类 号：TH69[机械工程—机械制造及自动化]