波浪形界面结构的Al_(2)O_(3)/PMMA交叠薄膜设计与力学性能仿真  

Design and Mechanical Simulation of Al_(2)O_(3)/PMMA Laminates with Wavy Interface Structures

作　　者：赵金威 洪德铭 周雄图[2] 张永爱[2] 吴朝兴[2] 郭太良[2] 林坚普 ZHAO Jinwei;HONG Deming;ZHOU Xiongtu;ZHANG Yongai;WU Chaoxing;GUO Tailiang;LIN Jianpu(School of Advanced Manufacturing,Fuzhou University,Quanzhou Fujian 362200,CHN;School of Physics and Information Engineering,Fuzhou University,Fuzhou 350116,CHN)

机构地区：[1]福州大学先进制造学院,福建泉州362200 [2]福州大学物理与信息工程学院,福州350116

出　　处：《光电子技术》2022年第4期286-291,共6页Optoelectronic Technology

基　　金：福建省教育厅中青年教师教育科研项目(JAT210030);福建省自然科学基金(2021J01577);闽都创新实验室自主部署项目(2021ZZ130)。

摘　　要：文章以Al_(2)O_(3)/PMMA交叠薄膜为例,在其交叠界面处引入波浪形结构,通过增加Al_(2)O_(3)在弯曲方向的实际长度改善其力学性能。采用有限元仿真方法对Al_(2)O_(3)/PMMA交叠薄膜结构进行建模,分别研究了波浪形结构形貌、周期、深度和PMMA厚度等参数对交叠薄膜弯曲性能的影响规律。仿真结果表明,波浪形界面结构能较大提高交叠薄膜的弯曲性能,当波浪形结构的周期在500~1500 nm,深度在600~1600 nm范围内,PMMA厚度为6μm时,交叠薄膜具有较好的弯曲性能,相比于没有引入界面结构的交叠薄膜,同等条件下产生的最大应力下降了超过70%,有效提升了封装薄膜的弯曲性能,对后续无机/有机交叠薄膜的制备工艺具有指导意义。The structure of Al_(2)O_(3)/PMMA overlapping thin films was modeled by finite element simulation method,and the effects of wave structure morphology,period,depth and PMMA thickness on the bending properties of overlapping thin films were studied,respectively.Simulation results showed that the wavy interface structure could greatly improve the bending properties of the overlapping thin film.When the wavy structure had a period of 500~1500 nm,a depth of 600~1600 nm and the thickness of PMMA was 6μm,the overlapping thin film had better bending properties.Under the same conditions,the maximum stress was reduced by more than 70%compared with the overlapping thin film without the interface structure,which could effectively improve the bending performance of the encapsulated thin film.It had guiding significance for the preparation of inorganic/organic overlapping thin films.

关 键 词：柔性有机发光二极管显示 薄膜封装 有限元仿真 界面结构 弯曲性能 

分 类 号：TN383[电子电信—物理电子学] TN873