光学元件亚表面缺陷表征与检测技术研究现状分析(特邀)  

Research status analysis of subsurface damage characterization and measurement technology of optical components(invited)

作　　者：李凌众 王孝坤[1,2] 戚二辉 彭利荣 于鹏亮 苏航 刘忠凯 王晶 罗霄[1,2] 张学军 蔡铭宣[4] Li Lingzhong;Wang Xiaokun;Qi Erhui;Peng Lirong;Yu Pengliang;Su Hang;Liu Zhongkai;Wang Jing;Luo Xiao;Zhang Xuejun;Cai Mingxuan(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;University of Chinese Academy of Sciences,Beijing 100049,China;Harbin Xinguang Optic-eletronics Technology Co.,Ltd,Harbin 150028,China;School of Electro-optical Engineering,Changchun University of Science and Technology,Changchun 130022,China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院大学,北京100049 [3]哈尔滨新光光电科技股份有限公司,黑龙江哈尔滨150028 [4]长春理工大学光电工程学院,吉林长春130022

出　　处：《红外与激光工程》2022年第12期211-233,共23页Infrared and Laser Engineering

基　　金：吉林省重点研发计划(20200401065GX);国家自然科学基金(62127901)。

摘　　要：光学元件常用脆性材料作为原材料,脆性材料加工过程中极易引入亚表面缺陷,亚表面缺陷对脆性材料的制造阶段和应用阶段均存在严重的危害。制造方面,亚表面缺陷影响工序的选择与衔接,易产生过加工、欠加工等问题,导致加工效率低下;应用方面,亚表面缺陷影响光学元件的成像质量、稳定性、使用寿命等关键技术参数。为了高效率、高质量地去除亚表面缺陷,全面表征和准确检测光学元件的亚表面缺陷至关重要。文中首先介绍了不同加工方式对应的亚表面缺陷形成机理与亚表面缺陷的表征方法研究现状;其次归纳总结了破坏性与非破坏性的亚表面缺陷检测方法,分别介绍了不同检测方法的原理、适用材料与加工阶段、优点与不足之处;并介绍了基于表面粗糙度、加工参数的亚表面缺陷预测方法;最后,对亚表面缺陷检测技术的发展趋势进行了展望。Brittle materials are usually used as raw materials for optical elements.Subsurface damage(SSD)is easily generated during the processing of brittle materials.SSD causes serious hazard to the manufacturing and application stage of brittle materials.In terms of manufacturing,SSD affects the selection and connection of processes,which is easy to cause problems such as excessive processing and lack of processing,and resulting in low processing efficiency.In terms of application,SSD affects key technical indicators such as imaging quality,stability,and service life of optical components.Comprehensive characterization and accurate measurement of SSD in optical components is critical for efficient,and high-quality removal of SSD.In this paper,the formation mechanism of SSD corresponding to different processing methods and the characterization methods of SSD are introduced firstly.Then the destructive and non-destructive SSD measurement methods are summarized.The principles,applicable materials,applicable processing stages,advantages and disadvantages of different measurement methods are introduced,respectively.The SSD prediction methods based on surface roughness and processing parameters are presented.Finally,the development trend of SSD measurement technology is prospected.

关 键 词：光学元件 亚表面缺陷 缺陷形成机理 亚表面缺陷表征 破坏性检测方法 非破坏性检测方法 

分 类 号：TN205[电子电信—物理电子学]