液体静压导轨油膜结合面误差对导轨几何误差的影响机制  被引量:3

Influence mechanism of the oil film contact surface error of the hydrostatic guide rail on the geometric error of the guide rail

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作  者:张云[1] 曹聪 姜忠 王立平[1] ZHANG Yun;CAO Cong;JIANG Zhong;WANG LiPing(Department of Mechanical Engineering,Tsinghua University,Beijing 100084,China;School of Mechanical and Electrical Engineering,University of Electronic Science and Technology of China,Chengdu 611731,China;Institute of Machinery Manufacturing Technology,China Academy of Engineering Physics,Mianyang 621900,China)

机构地区:[1]清华大学机械工程系,北京100084 [2]电子科技大学机械与电气工程学院,成都611731 [3]中国工程物理研究院机械制造工艺研究所,绵阳621900

出  处:《清华大学学报(自然科学版)》2023年第1期52-61,共10页Journal of Tsinghua University(Science and Technology)

基  金:工信部制造业高质量发展专项(TC200H02J);国家自然科学基金青年项目(52105490);国家自然科学基金面上项目(51975319)。

摘  要:液体静压导轨是超精密车床的主要核心部件,其几何误差对超精密车床的加工精度起着至关重要的作用。制造装配误差以及变形误差是影响液体静压导轨几何误差的主要因素。为了提高液体静压导轨几何误差和精度保持性,该文建立液体静压导轨流固耦合仿真模型和螺栓预紧力学模型,分别讨论油压等因素作用下的静压导轨变形和螺栓预紧变形规律,提出表征制造装配误差的数学模型,建立油膜均化作用下的变形误差传递模型,分析导轨压板油膜结合面误差(即压力油膜所支承的结构表面误差)对工作台几何误差的影响机制。研究表明:液体静压导轨压力油膜的误差均化作用使得其几何误差远低于自身零部件面形误差,但压力油膜并不能完全均化油膜结合面上的误差;结合面误差增加的同时,其油膜均化能力逐渐减弱;此外,液体静压导轨直线度误差对油膜结合面误差幅值更为敏感,而角度误差受结合面误差函数的波长和相位差的影响更为明显。实验测量的导轨几何误差与模型预测结果一致。该研究为超精密车床的液体静压导轨制造、装备工艺提供了有益参考。With the advancement of research and development of weapon systems in China’s major scientific projects and defense fields,diamond turning is widely used in the processing of high-performance parts,such as the precision of physical experimental samples and optical parts.Hydrostatic guideways have become the core components of ultraprecision lathes due to their high precision and rigidity.Its geometric error is critical in determining the machining accuracy of ultraprecision lathes.The main factors influencing the geometric errors of hydrostatic guide rails are manufacturing and assembly errors,as well as deformation errors caused by oil pressure.In this research,the fluid-structure coupling simulation model and the bolt preloading mechanical model of the hydrostatic guideway are established to improve the geometric error and accuracy retention of the hydrostatic guideway and discuss the structural deformation and bolt preloading of the hydrostatic guideway caused by the pressure due to oil supply and other factors.The error in a mathematical model to characterize the oil film joint surface under the action of manufacturing,assembly,and oil pressure is proposed using the deformation law of tight structure,and the deformation error transfer model under the action of oil film homogenization is established.The influence mechanism of the oil film bonding surface error of the guide rail pressure plate on the geometric error of the worktable is analyzed.The research shows that the error in the homogenization effect of the pressure oil film of the hydrostatic guideway makes its geometric error much lower than the surface error of its parts,but the pressure oil film cannot completely homogenize the error on the oil film joint surface.The increase in amplitude,linear error PV value,and angle error PV value are proportional as the two types of errors have the same growth rate.The maximum linear and angular geometric errors are 0.22μm and 1.58μrad,respectively.This shows that as the surface shape error of the parts incre

关 键 词:金刚石车床 液体静压导轨 结合面误差 油膜均化作用 几何误差 

分 类 号:TH162[机械工程—机械制造及自动化]

 

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