基于奇偶函数分解算法的绝对检验对比研究  

Comparative study of absolute test method based on odd-even function decomposition algorithm

作　　者：李若琨 陈磊[1] 马致遥 张喆 胡晨辉 郑东晖[1] 胡志豪 LI Ruokun;CHEN Lei;MA Zhiyao;ZHANG Zhe;HU Chenhui;ZHENG Donghui;HU Zhihao(School of Electronic and Optical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China)

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094

出　　处：《光学技术》2022年第6期684-689,共6页Optical Technique

基　　金：国家自然科学基金项目(62005122,U1731115);江苏省自然科学基金青年基金(BK20200458)。

摘　　要：奇偶函数法与N次旋转法是平面绝对检验方法中常用的两种方法,这两方法在恢复面形的过程中都使用了奇偶函数分解算法,但是在求解奇奇项方面使用的方法不同,对比了这两种绝对检验方法。在奇偶函数法与N次旋转法的算法仿真过程中加入待测平晶重力形变的有限元分析,并对100mm口径平晶进行奇偶函数法与N次旋转法实验,将面形恢复结果与液面法测量结果对比,结果显示奇偶函数法恢复面形的PV值差值为4.864nm,N次旋转法恢复面形的PV值差值为1.853nm。结果表明存在重力影响时,N次旋转法恢复面形精度优于奇偶函数法。仿真分析旋转角度误差对于奇偶函数法与N次旋转法的影响,结果显示N次旋转法抗旋转角度误差能力强于奇偶函数法。The odd-even function method and the N-rotation method are two commonly used methods in absolute flatness test.Both of them use the odd-even function decomposition algorithm in the process of recovering the surface shape,but they use different methods in solving the odd-odd function.The two absolute test methods are compared.The finite element analysis of the gravity deformation of flat is added to the simulation of the odd-even function method and the N-rotation method.The experiments of the odd-even function method and the N-rotation method are carried out on the flatness with a diameter of 100 mm,and the surface shape recovery results are compared with the measurement results of the liquid surface method.The results show that the PV difference of surface shape restored by odd-even function method is 4.864 nm,and that of surface shape restored by N-rotation method is 1.853 nm.The results show that the accuracy of the N-rotation method is better than the odd-even function method when there is gravity.The effect of rotation angle error on the odd-even function method and N-rotation method is analyzed by simulation.The results show that the N-rotation method is stronger than the odd-even function method in resisting rotation angle error.

关 键 词：干涉测量 平面绝对检验 奇偶函数法 N次旋转法 有限元分析 

分 类 号：TH744[机械工程—光学工程]