面向声压传感的硅基槽式谐振腔设计及研究  

Design and Research of Silicon-based Resonator for Sound Pressure Sensing

作　　者：祝敏 张文栋[1] 崔建功[1] 楚晓霞 余亚鑫 张国军[1] 王任鑫[1] 何常德[1] 杨玉华[1] ZHU Min;ZHANG Wen-dong;CUI Jian-gong;CHU Xiao-xia;YU Ya-xin;ZHANG Guo-jun;WANG Ren-xin;HE Chang-de;YANG Yu-hua(North University of China,State Key Laboratory of Dynamic Testing Technology Jointly Built by Provincial and Ministry,Taiyuan 030051,China)

机构地区：[1]中北大学,省部共建动态测试技术国家重点实验室,山西太原030051

出　　处：《仪表技术与传感器》2023年第1期1-6,共6页Instrument Technique and Sensor

基　　金：山西省基础研究计划资助项目(202103021224203,20210302123027);国家自然科学基金面上项目(52175553);国家重点研发计划(2019YFC0119800);山西省“1331工程”重点学科建设计划。

摘　　要：针对硅基波导腔在折射率传感领域的应用,提出了一种使用低杨氏模量的聚合物SU8作为上包层的硅基槽式微环谐振腔结构。基于耦合模理论优化了硅基槽式微环谐振腔的传输特性和特征参量,并分析了声压传感机理;采用MEMS工艺进行了器件的加工制备,并利用高温氮退火的方式对波导表面进行了光滑化处理;搭建了测试平台,对制备得到的谐振腔进行测试。测试结果表明:品质因数(Q值)可达2.76×10^(4),声压灵敏度可达2.19×10^(3)mV/kPa。相较于传统的全通型硅基波导微环谐振腔,文中设计的使用SU8封装的硅基槽式微环腔对光场的局域能力更强,在声压传感领域有着更好的应用潜力。For the application of a silicon-based waveguide cavity in the field of refractive index sensing,a silicon-based groove microloop resonator structure using a polymer SU8 with a low Young’s modulus as an upper coating was proposed.Firstly,the transmission characteristics and characteristic parameters of the silicon-based groove microring resonator were optimized based on the coupling mode theory,and the sound pressure sensing mechanism was analyzed,followed by MEMS process,and the waveguide surface was smoothed by high temperature nitrogen annealing.The test platform was built to test the prepared cavity and show that the quality factor(Q value)can reach 2.76×10^(4),sound pressure sensitivity can be up to 2.19×10^(3) mV/KPa.Compared with the traditional full-pass silicon-based waveguide microring resonator,the silicon-based groove microring cavity designed with SU8 package has better ability for optical field localization,and has better application potential in the field of sound pressure sensing.

关 键 词：微环谐振腔 折射率传感 传输矩阵理论 品质因数 

分 类 号：TB256[一般工业技术—工程设计测绘]