浅析某微电子产业园制造厂房超纯水处理系统案例  

Analysis on Ultra-Pure Water Treatment System in Manufacturing Plant of Microelectronics Industrial Park

作　　者：张泽超 ZHANG Zechao(College of Thermal Engineering,Shandong University of Architecture)

机构地区：[1]山东建筑大学热能工程学院

出　　处：《上海节能》2023年第2期217-221,共5页Shanghai Energy Saving

摘　　要：随着科技的进步,半导体芯片制造业得以快速发展,但由于其制造工艺的精密性和复杂性,对工艺中所用水质要求极高。以青岛微电子产业园制造厂房为例,介绍了一种超纯水制造工艺,并对现状提出了维护措施和成本分析。经实际运行测试,该系统制备的超纯水稳定优质,节水节能效率高,保障了工艺生产所需,为同类型工业厂房纯水系统提供了参考。With the progress of science and technology,the semiconductor chip manufacturing industry has developed rapidly.However,due to the precision and complexity of its manufacturing process,the water quality used in the process is highly required.Taking the manufacturing plant of Qingdao Microelectronics Industrial Park as an example,this paper introduces a manufacturing process of ultra-pure water,and puts forward maintenance measures and cost analysis for the current situation.The actual operation test shows that the ultra-pure water prepared by the system is stable and high quality,with high water saving and energy saving efficiency,which ensures the needs of process production and provides a reference for the pure water system of the same type of industrial plants.

关 键 词：纯水系统 RO反渗透 UF超滤 EDI除盐 系统调试 

分 类 号：TU991.4[建筑科学—市政工程]