调制周期对ZrN/TiCuN纳米多层涂层的微观结构与力学性能的影响  

Effect of modulation period on microstructures and mechanical properties of ZrN/TiCuN nano multilayers

作　　者：赵升升[1] 黄美东 赵彦辉[3] 王红英[1] 彭滨 王启民[4] ZHAO Shengsheng;HUANG Meidong;ZHAO Yanhui;WANG Hongying;PENG Bin;WANG Qimin(School of Mechanical and Electrical Engineering,Shenzhen Polytechnic,Shenzhen 518055,Guangdong Province,China;College of Physics and Materials Science,Tianjin Normal University,Tianjin 300387,China;Institute of Metal Research,Chinese Academy of Sciences,Shenyang 110016,China;School of Electromechanical Engineering,Guangdong University of Technology,Guangzhou 510006,China)

机构地区：[1]深圳职业技术学院机电工程学院,广东深圳518055 [2]天津师范大学物理与材料科学学院,天津300387 [3]中国科学院金属研究所,沈阳110016 [4]广东工业大学机电工程学院,广州510006

出　　处：《天津师范大学学报（自然科学版）》2022年第6期8-15,共8页Journal of Tianjin Normal University：Natural Science Edition

基　　金：深圳职业技术学院重点项目(6020310007K);深圳市基础研究项目(JCYJ20190809150001747)。

摘　　要：为了系统研究电弧离子镀技术制备的纳米多层涂层的微观结构与力学性能的关系,通过调节样品转速,制备了不同调制周期的ZrN/TiCuN纳米多层涂层.利用扫描电子显微镜(SEM)、能量色散X射线光谱仪(EDS)、X射线衍射仪(XRD)、透射电子显微镜(TEM)及纳米压痕仪,分析了多层涂层的微观形貌、化学成分、相结构和力学性能以及多层涂层界面的微观结构对涂层力学性能的影响.结果表明,Zr N/TiCuN纳米多层涂层属于典型的电弧离子镀涂层表面形貌.随着调制周期减小,纳米单层厚度变薄,涂层表面形貌及厚度变化不明显;涂层中Zr、Ti的含量先降低后略有升高,而N含量的变化与之相反,且所有多层涂层和单层涂层都呈现出过化学计量比(N/Zr或N/Ti);多层涂层中ZrN(200)衍射峰强度逐渐减小,硬度逐渐提高,在调制周期最小时硬度达到最大值31.5 GPa;Zr N/Ti CuN多层涂层界面处存在大量共格结构,且连续贯穿几个相邻涂层,在涂层界面处可以发现较多位错.随着调制周期减小,膜层更均匀.在多层涂层结构中,降低涂层厚度、增加共格结构的界面可有效增加纳米多层涂层的硬度.In order to systematically study the relationship between microstructure and mechanical properties of nano-multilayer coatings prepared by arc ion plating technology,ZrN/TiCuN nano-multilayer coatings with different modulation periods were prepared by adjusting the sample rotating speed.The micromorphology,chemical composition,phase structure and mechanical properties of multilayer coatings and the influence of the microstructure of the interface of multilayers coatings on the mechan-ical properties of coatings were analyzed by scanning electron microscopy(SEM),energy dispersive X-ray spectrometer(EDS),X-ray diffraction(XRD),transmission electron microscopy(TEM)and nano-indentations.The results indicated that the surface morphology of ZrN/TiCuN nano multilayer coating was typical arc ion plating.With the decrease of modulation period,the surface morphology and thickness of the film did not change significantly,and the thickness of single layer in the multilayer film gradually became thinner.The contents of Zr and Ti in the film decreased gradually at first and then increased slightly,while the contents of N changed in the opposite way,and all the multilayer films and the corresponding monolayer films showed over chemical ratio(N/Zr or N/Ti).With the decrease of modulation period,the diffraction peak intensity of ZrN(200)in the multilayers decreased,and the hardness of the multilayers gradually increased,reaching the maximum of 31.5 GPa at the min-imum modulation period.There are a large number of coherent structures at the interface of ZrN/TiCuN multi-coating,which continuously run through several adjacent coatings,and many dislocations can be found at the interface of coating.In the multilayer coating structure,reducing the coating thickness and increasing the interface of the coherent structure is a reliable method to increase the hardness of the nano multilayer coating.

关 键 词：纳米多层涂层 ZrN/TiCuN 多弧离子镀 微观结构 力学性能 

分 类 号：TG148[一般工业技术—材料科学与工程]