非均匀磁场螺旋波等离子体研究进展  

Recent Progress on Non-Uniform Magnetic Field Helicon Plasma

作　　者：孙萌[1] 张海宝[1] 陈强[1] SUN Meng;ZHANG Haibao;CHEN Qiang(Laboratory of Plasma Physics and Materials,Bejing Institute of Graphic Communication,Beijing 102600,China)

机构地区：[1]北京印刷学院等离子体物理与材料实验室,北京102600

出　　处：《真空科学与技术学报》2022年第12期877-889,共13页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金项目(No.11875090);北京市教委科技项目(No.KM202010015003)。

摘　　要：螺旋波等离子体具有高电离率、低工作气压、低外加磁场、无内电极、静态均匀性好等特点,广泛应用于聚变研究、等离子体推进、等离子体材料处理等领域。均匀磁场和非均匀磁场下螺旋波等离子体的耦合效率有所不同,在螺旋波等离子体源中应用非均匀磁场可显著改善等离子体参数和射频能量吸收,提高等离子体电离效率。本文主要对非均匀磁场下的螺旋波等离子体的磁场设计及分布、放电特性、应用进行综述,并展望了非均匀磁场螺旋波等离子体的发展方向。Helicon plasma has the characteristics of high ionization rate, low working pressure, low external magnetic field, no internal electrode and good static uniformity. It is widely used in fusion research, plasma propulsion, plasma material processing and other fields. The coupling efficiency of helicon plasma with a non-uniform magnetic field is different from a uniform magnetic field. The application of a non-uniform magnetic field in the helicon plasma source can significantly improve plasma parameters and RF energy absorption and improve plasma ionization efficiency. In this paper, the design and distribution of magnetic field, discharge characteristics and applications of helicon plasma with a non-uniform magnetic field are reviewed, and the development direction of helicon plasma with a non-uniform magnetic field is proposed.

关 键 词：螺旋波等离子体 非均匀磁场 耦合机制 天线设计 放电特性 

分 类 号：V439.2[航空宇航科学与技术—航空宇航推进理论与工程]