大功率准分子激光器气体流场数值分析  

Numerical Analysis of Gas Flow Field of High-Power Excimer Laser

作　　者：杨礼昭 方晓东 游利兵 Yang Lizhao;Fang Xiaodong;You Libing(School of Environmental Science and Optoelectronic Technology,University of Science and Technology of China,Hefei 230026,Anhui,China;Anhui Province Key Laboratory of Photonic Devices and Materials,Anhui Institute of Optics and Fine Mechanics,Hefei Institutes of Physical Science,Chinese Academy of Sciences,Hefei 230031,Anhui,China;College of New Materials and New Energies,Shenzhen Technology University,Shenzhen 518118.Guangdong,China;Shenzhen Shengfang Technology Company Ltd.,Shenzhen 518173,Guangdong,China)

机构地区：[1]中国科学技术大学环境科学与光电技术学院,安徽合肥230026 [2]中国科学院合肥物质科学研究院安徽光学精密机械研究所安徽省光子器件与材料重点实验室,安徽合肥230031 [3]深圳技术大学新材料与新能源学院,广东深圳518118 [4]深圳盛方科技有限公司,广东深圳518173

出　　处：《中国激光》2022年第21期54-61,共8页Chinese Journal of Lasers

基　　金：国家自然科学基金(41627803);深圳市科技计划资助项目(JCYJ20210324120207021,KQTD20170331115422184);深圳技术大学新引进高端人才财政补助科研启动项目(2020101);中国科学院核心关键技术攻关项目(ZKYXG-2018-04)。

摘　　要：准分子激光器作为放电激励的气体激光器,其激光介质气体在主放电电极间辉光放电产生激光的同时,也在放电区域产生气态和固态的放电产物以及大量的热。通常在激光腔内放置横流风机,以维持放电区域气体的流动和更新,从而保证激光器以重复频率工作时,每一次放电不受前一次放电产物和热量的影响。对于大功率(>300 W)准分子激光器,其放电区域体积大,且具有更高的放电电压和放电重复频率,因此对主放电电极间的气体流场具有更高要求。本课题组采用二维模型,针对一套自行设计的大功率准分子激光器放电腔结构和气体循环系统进行了稳态流场数值分析。数值分析结果显示,当风机转速为3500 r/min时,放电区域气体的平均流速高于32.76 m/s,且气体流速均匀。这一结果从理论上证明了该循环系统可以满足大功率准分子激光器的工作要求。Objective The dielectric gas in excimer lasers generates light via glow discharge between the main discharge electrodes, which produces gaseous and solid discharge products and a large amount of heat in the discharge area. Generally, a crossflow fan is used in the laser chamber to maintain and renew the gas flow in the discharge area, thus ensuring that each discharge is not affected by the products and heat from the previous when the laser operates repeatedly. For highpower(> 300 W) excimer lasers, their discharge area is large;moreover, the high-power excimer lasers have higher discharge voltage and frequency than medium-or low-power excimer lasers, so there are higher requirements for the gas flow field between the main discharge electrodes. This article studies a 600 W high-power excimer laser with a laser discharge voltage of up to 30 k Vand a discharge repetition rate of up to 600 Hz. Its discharge area generates more discharge products, and has a heat-generation power of close to 50 k Wat full power output, so a higher gas-renewal rate is required between the discharge electrodes. Therefore, when developing this high-power excimer laser, the structural design of the discharge chamber and gas-circulation system within it are critical, and flow-field analysis is required to provide a theoretical basis for the design.Methods A multiple-reference-frame model is used to simulate the steady-state flow field in the laser. In the model, the rotation of the crossflow fan provides all the kinetic energy of the flow field. The flow field simulation adopts the standard k-ε turbulence model. To improve the reliability of the simulation results, we also selected the renormalization group(RNG) and Realizable k-ε turbulence models for simulation calculations and compared the results.Results and Discussions Figure 2 shows the numerical calculation results of the flow field in the laser chamber. Figures 2(a) and(b) show the global flow velocity distribution and absolute pressure distribution, which provide a reference for

关 键 词：激光器 准分子激光器 气体循环系统 流场 数值分析 

分 类 号：TN248.2[电子电信—物理电子学] O355[理学—流体力学]