基于相位测量偏折术的成像透镜轴外点波像差测量  

Off-Axis Point Wave Aberration Testing for Imaging Lens Based on Phase Measuring Deflectometry

作　　者：阮一郎 李大海[1,2] 余林治 张新伟 肖翔天 Ruan Yilang;Li Dahai;Yu Linzhi;Zhang Xinwei;Xiao Xiangtian(College of Electronics and Information Engineering,Sichuan University,Chengdu 610065,Sichuan,China;School of Aeronautics and Astronautics,Sichuan University,Chengdu 610065,Sichuan,China)

机构地区：[1]四川大学电子信息学院,四川成都610065 [2]四川大学空天科学与工程学院,四川成都610065

出　　处：《中国激光》2022年第21期105-114,共10页Chinese Journal of Lasers

基　　金：国家自然科学基金(U20A20215,61875142);四川大学基金(2020SCUNG205)。

摘　　要：提出了一种测量成像透镜轴外点波像差的方法。基于逆哈特曼原理建立了逆光线追迹模型,通过标定的系统参数,测量了透镜轴外视场点的波像差。通过模拟和实验,对该方法进行了验证,并对实验误差进行了分析。实验测量了有效孔径为60 mm的平凸透镜在不同视场下的波像差,将实验结果和模拟结果进行了对比分析,并且分析了轴外点初级像散和初级彗差随视场和入瞳孔径的变化规律。该方法具有测量动态范围大、测量系统结构简单、实验设备成本低廉、测量环境易实现等优点,并且无需复杂的相机标定过程,为透镜的轴外点波像差测量提供了一个可行方案。Objective Imaging lenses, as a type of important optical element, are widely used in microscopes, cameras, and lasers. The demand for imaging lenses has considerably increased because of the rapid development of the optical industry, and there is an important need for a method that can efficiently measure the wave aberration of imaging lenses. The existing methods mainly include interferometry and geometric methods.Interferometry can achieve high accuracy. However, this has limitations in practice because of its low dynamic range, high costs, and inability to be used for online optics testing. Furthermore, this method cannot measure the off-axis aberration of imaging lenses. The accuracy of the Shack-Hartmann test method is limited by the size and quality of the microlens array and the low sampling rate of the data used to reconstruct the wavefront. The Ronchi test method is usually used to measure low-order aberrations and cannot completely evaluate wavefronts. The accuracy of Moiré deflectometry greatly depends on the grating quality. To overcome the existing difficulties, we propose a new method for measuring the off-axis aberration of imaging lenses. This method has the advantages of high dynamic range, simple equipment, low cost, and is not sensitive to the testing environment. Furthermore, complex camera calibration processes are avoided.Methods During the reversed Hartmann test, rays are emitted from the pinhole of the camera. These rays leave the exit pupil of the lens and intersect the liquid crystal display(LCD) screen. The wave aberration of the lens can be calculated using the aberration theory as long as the coordinates of the idea intersection points, real intersection points, and exit pupil plane are obtained. Therefore, a measurement system is built, and the coordinates of the real intersection points are obtained using a phase shift algorithm. Meanwhile, the model of the experiment system is built in software with calibrated parameters. The coordinates of the idea intersection points and the exi

关 键 词：测量 透射波前检测 相位测量偏折术 波像差 轴外点 

分 类 号：O436[机械工程—光学工程]