Fabrication and characterization of on-chip silicon spherical-like microcavities with high Q-factors  

作　　者：Hailong Han Hao Li Lixing You Xiaoping Liu 韩海龙;李浩;尤立星;刘晓平(State Key Laboratory of Functional Materials for Informatics,Shanghai Institute of Microsystem and Information Technology(SIMIT),Chinese Academy of Sciences(CAS),Shanghai 200050,China;CAS Center for Excellence in Superconducting Electronics(CENSE),Shanghai 200050,China;School of Physical Science and Technology,ShanghaiTech University,Shanghai 201210,China)

机构地区：[1]State Key Laboratory of Functional Materials for Informatics,Shanghai Institute of Microsystem and Information Technology(SIMIT),Chinese Academy of Sciences(CAS),Shanghai 200050,China [2]CAS Center for Excellence in Superconducting Electronics(CENSE),Shanghai 200050,China [3]School of Physical Science and Technology,ShanghaiTech University,Shanghai 201210,China

出　　处：《Chinese Optics Letters》2022年第11期26-30,共5页中国光学快报（英文版）

基　　金：supported by the Zhejiang Key Research and Development Program(No.2021C01188);the start-up funding from ShanghaiTech University;the Shanghai Municipal Science and Technology Major Project(No.2017SHZDZX03)。

摘　　要：An effective way to fabricate high-quality(Q)silicon microcavities on-chip is proposed and studied.Our fabrication technique consists of two significant steps:(1)patterning a special silicon micro-pillar by Bosch processes and(2)subsequent reflow of the pillar into a spherical-like microcavity using a laser pulse at 532 nm.Its shape and surface roughness are characterized using a scanning electron microscope and an atomic force microscope.The root-mean-square roughness of the surface is about 0.6 nm.A representative value for the loaded Q-factors of our silicon spherical-like microcavities is on the order of 10^(5).

关 键 词：optical microcavity whispering gallery mode high Q-factor 

分 类 号：TN25[电子电信—物理电子学]