能量耦合模型的飞秒激光烧蚀面齿轮形貌研究  

Research on surface gear topography of femtosecond laser ablation based on energy coupling model

作　　者：明兴祖 马玉龙[1] 贾松权 周贤 刘克非 明瑞 MING Xing-zu;MA Yu-long;JIA Song-quan;ZHOU Xian;LIU Ke-fei;MING Rui(School of Mechanical Engineering,Hubei University of Arts and Science,Xianyang 441053,China;School of Mechanical Engineering,Hunan University of Technology,Zhuzhou 412007,China)

机构地区：[1]湖北文理学院机械工程学院,湖北襄阳441053 [2]湖南工业大学机械工程学院,湖南株洲412007

出　　处：《激光与红外》2023年第1期41-50,共10页Laser & Infrared

基　　金：国家自然科学基金项目(No.51975192);湖南自然科学基金项目(No.2021JJ30215,No.2021JJ50042);“机电汽车”湖北省优势特色学科群开放基金资助项目(No.XKQ2021044,No.XKQ2021050)资助。

摘　　要：飞秒激光精微加工面齿轮材料18Cr2Ni4WA是去除材料的先进制造方法。本文依据烧蚀凹坑的深度与宽度和激光能量密度的关系得到材料的烧蚀阈值和影响重叠率的因素。考虑齿轮材料成分间互温感应效应与多脉冲激光累积效应,建立材料的能量复耦合模型。通过改变激光能量密度和脉冲数,研究飞秒激光烧蚀凹坑及齿面形貌表面的变化规律,得出脉冲数对烧蚀效果影响小,激光能量密度为1.730 J/cm2激光功率为1.9 W脉冲数N=3000进行烧蚀效果最好可得到最优的实际烧蚀面深度为17.604μm。Femtosecond laser micro-machining of face gear material 18Cr2Ni4WA is an advanced manufacturing method for removing materials. In this paper, according to the relationship between the depth and width of ablation pits and laser energy density, the ablation threshold of materials and the factors affecting the overlap ratio are obtained. Considering the inter-temperature induction effect between gear material components and the accumulation effect of multi-pulse laser, the energy complex coupling model of the material is established. By changing the laser energy density and the number of pulses, the change rule of femtosecond laser ablation pits and tooth surface topography is studied. It is concluded that the number of pulses has little effect on the ablation effect, and the laser energy density is 1.730 J/cm~2,the laser power is 1.9 W,the pulse number N=3000,and the best ablation effect can be obtained, and the optimal actual ablation surface depth is 17.604 μm.

关 键 词：飞秒激光 面齿轮 烧蚀阈值 重叠率 形貌特征 

分 类 号：O436[机械工程—光学工程] TN249[理学—光学]