高分辨透射电子显微镜的校准方法  

Research on the Calibration Methods of High-Resolution Transmission Electron Microscopy

作　　者：王芳[1] 施玉书[1] 周莹[2] WANG Fang;SHI Yushu;ZHOU Ying(National Institute of Metrology,Beijing 100029,China;Shanghai Institute of Measurement and Testing Technology,Shanghai 201203,China)

机构地区：[1]中国计量科学研究院,北京100029 [2]上海市计量测试技术研究院,上海201203

出　　处：《计量科学与技术》2022年第11期16-19,共4页Metrology Science and Technology

基　　金：国家重点研发计划(2020YFF0218403);中国计量科学研究院基本科研业务费项目(AKYZD2007-1)。

摘　　要：透射电子显微镜作为纳米尺度的重要分析工具,其长度量值的准确性将直接影响样品的测量结果。本研究采用单晶硅晶格标准器,对高分辨透射电子显微镜的长度测量误差与长度测量重复性进行了校准,并对长度测量误差的不确定度进行评定。为说明校准方法的适用性,研究中对三台不同型号的高分辨透射电子显微镜进行了校准实验,结果显示该校准方法具有广泛的代表性,可实现透射电子显微镜的精确评价,测量量值可溯源至硅晶格常数,为纳米技术领域的精准测量提供技术保障。As an important analytical tool at the nano-scale,the accuracy of the length measurement value of the transmission electron microscopy(TEM)will directly affect the measurement results of samples.In this study,the length measurement error and length measurement repeatability of the high-resolution TEM were calibrated using single-crystal silicon lattice standards,and the uncertainty of the length measurement error was evaluated.To illustrate the applicability of the calibration method,calibration experiments were conducted on three different models of high-resolution TEMs in the study.The results show that the calibration method is widely representative and can achieve an accurate evaluation of TEMs with measured quantities traceable to the silicon lattice constant,which provides technical assurance for accurate measurements in the field of nanotechnology.

关 键 词：硅晶面间距 高分辨透射电子显微镜 纳米计量 溯源性 校准 

分 类 号：TN16[电子电信—物理电子学]