新型电容式传感器的设计与优化  

Design and optimization of novel capacitive sensor

作　　者：史兆强 李明 SHI Zhaoqiang;LI Ming(College of Electronic and Information Engineering,Henan Institute of Technology,Xinxiang 453003,China)

机构地区：[1]河南工学院电子信息工程学院,河南新乡453003

出　　处：《传感器与微系统》2023年第2期105-108,113,共5页Transducer and Microsystem Technologies

基　　金：国家自然科学基金面上资助项目(51623698)。

摘　　要：首先,基于微电容式超声波换能器(CMUT)建模理论,依据CMUT的电学特性和机械特性,构建了等效电路模型和平行板电容模型;然后,给出了CMUT薄膜的振动位移、固有频率、塌陷电压以及转换系数等关键的特性参量表达式,完善了CMUT理论体系,确定了结构尺寸;最后,针对CMUT设计主要用到的Ansys有限元仿真分析方法存在的操作复杂、运算时间长等问题,提出了一种利用Simulink状态模型对CMUT特性的动态仿真分析的方法。通过对CMUT发射/接收动态系统模型的建立,实现了其性能的仿真与分析,为后续实际应用提供了重要的理论指导,同时该动态系统模型为CMUT设计提供了一种简单、高效的方法,提高了CMUT结构设计与分析的效率。Firstly, based on the modeling theory of capacitive micromachined ultrasonic transducer(CMUT),according to the electrical and mechanical characteristics of CMUT,the equivalent circuit model and the parallel plate capacitance model are built.Then, the key characteristic parameters such as vibration displacement, natural frequency, collapse voltage and conversion coefficient of CMUT film are given.The theoretical system of CMUT is improved and the structure size is determined. Finally, aiming at the problems of complex operation and long operation time of Ansys finite element simulation analysis method, which is mainly used in the design of CMUT,a dynamic simulation analysis method of CMUT characteristics is proposed by using Simulink state model.Through the establishment of the dynamic system model of CMUT transmitter/receiver, the simulation and analysis of its performance are realized, which provides important theoretical guidance for the future practice application, and the dynamic system model provides a simple and efficient method for CMUT design, which improves the efficiency of CMUT structure design and analysis.

关 键 词：微电容式超声波换能器 SIMULINK模型 动态系统 

分 类 号：TB332[一般工业技术—材料科学与工程]