基于多探头扫描法的运动直线度测量对比分析  

Comparative Analysis of Motion Straightness Measurement Based on Multi-probe Scanning Method

作　　者：袁海 夏仰球[1,2] 米良 石纯标[1,2] YUAN Hai;XIA Yang-qiu;MI Liang;SHI Chun-biao(Institute of Machinery Manufacturing Technology,China Academy of Engineering Physics,Mianyang 621900,China;National Machine Tool Production Quality Inspection Testing Center(Sichuan),Chengdu 610200,China)

机构地区：[1]中国工程物理研究院机械制造工艺研究所,绵阳621900 [2]国家机床产品质量检验检测中心(四川),成都610200

出　　处：《组合机床与自动化加工技术》2023年第2期45-49,共5页Modular Machine Tool & Automatic Manufacturing Technique

基　　金：四川省重大科技专项项目(2020ZDZX0003)。

摘　　要：为了识别多探头扫描法的测量误差控制要点,制定方法选择策略,建立了多探头扫描法误差模型和对比试验平台,对比研究了逐次两点法和频域三点法。首先,简要介绍了多探头直线度误差分离原理;其次,利用MATLAB搭建仿真分析系统,在时域和频域上分析了多种影响因素分别对两种方法测量误差的影响规律;最后,在相同试验环境下,基于影响因素控制在搭建的测量系统上对两种方法进行了对比试验。试验结果表明,频域三点法和逐次两点法测得的运动直线度误差最大差值为0.06μm,分离出的标准尺直线度误差最大差值为0.11μm,两种方法分离获得的测量结果趋势相似,频域三点法可以提供的直线度误差信息更全面。In order to identify the main points of controlling the measurement error of multi-probe scanning method, an error model and a comparative test platform for multi-probe scanning method were established, then STP(sequential two points) method and the TRPF(three points in frequency-domain) method were compared and studied.Firstly, the principle of straightness error separation of multiple probes was briefly introduced.Then, a simulation analysis system was built with MATLAB,and the effects of various factors on the measurement errors of the two methods were analyzed in time domain and frequency domain.Finally, in the same experimental environment, the two methods were compared on the measurement system based on the control of influencing factors.The experimental results show that the maximum error difference of motion straightness measured by STP method and TRPF method is 0.06 μm, and the maximum error difference of standard ruler straightness measured by STP method and TRPF method is 0.11 μm.The trend of measurement results obtained by the two methods is similar, but the TRPF method can provide more comprehensive straightness error information.

关 键 词：运动直线度 多探头扫描法 误差分离 影响因素分析 

分 类 号：TH16[机械工程—机械制造及自动化] TG502[金属学及工艺—金属切削加工及机床]