低温高真空环境下气体吸附材料吸气性能测试系统设计  

Design of Gas Adsorption Performance Measurements at Low Temperature and Low Pressure

作　　者：李晓刚 胡勇 高峰 胡湘娥 甘智华[2] LI Xiao-gang;HU Yong;GAO Feng;HU Xiang-e;GAN Zhi-hua(Zhongshan Kaixuan Vacuum Science&Technology Co.,Ltd.,Zhongshan 528478,China;Institute of Refrigeration and Cryogenics,Zhejiang University,Hangzhou 310013,China)

机构地区：[1]中山凯旋真空科技股份有限公司,广东中山528478 [2]浙江大学制冷与低温研究所,浙江杭州310013

出　　处：《真空》2023年第1期42-45,共4页Vacuum

基　　金：广东省重点领域研发计划项目资助(2021B0101300004)。

摘　　要：设计了利用动态法原理测试气体吸附材料吸气性能的系统,可以实现在15~500K温度范围,高真空(5.0×10-4Pa)至几个大气压压力范围内精确测量多种材料对不同气体的瞬时吸气速率、阶段气体吸附量、累积饱和吸附量等参数。研究表明该测试系统具有本底真空度高、结构合理紧凑、测试数据精确可靠的特点。A system is designed to test the gettering performance of gas adsorption materials by using the principle of dynamic method,which can achieve high vacuum(5.0×10-4Pa)to several atmospheres in the temperature range of 15-500K,measure the instantaneous adsorbing speed,adsorption capacity and saturation gas capacity of various materials for different gases accurately.The test results show that the system has the characteristics of high background vacuum,reasonable and compact structure,and accurate and reliable test data.

关 键 词：气体吸附材料 低温高真空 系统设计 

分 类 号：TB771[一般工业技术—真空技术]