硅基光子集成芯片光纤陀螺  

Silicon photonics integrated chip based optical fiber gyroscope

作　　者：毛玉政 何建 谢良平[1] 万洵[1] 崔志超 李艾伦 MAO Yuzheng;HE Jian;XIE Liangping;WAN Xun;CUI Zhichao;LI Ailun(Xi’an Flight Automatic Control Research Institute,Aviation Industry Corporation of China,Xi’an 710065,China;Aviation Military Representative Room of The Army Equipment Department in Zhuzhou,Zhuzhou 412000,China)

机构地区：[1]中国航空工业集团公司西安飞行自动控制研究所,西安710065 [2]陆军装备部驻株洲地区航空军事代表室,株洲412000

出　　处：《中国惯性技术学报》2023年第2期202-206,212,共6页Journal of Chinese Inertial Technology

基　　金：装备预先研究项目(50917010202)。

摘　　要：光纤陀螺用于敏感载体旋转角速率,是惯性导航系统的核心传感器之一。未来军用及民用领域对小体积、低成本的光纤陀螺需求巨大。利用光子集成芯片代替传统光纤分立器件,借助集成光学光刻工艺大规模批量生产的优势,降低生产成本,提高出货量,是光纤陀螺发展的重要方向。因此,在充分考虑目前国内微纳加工水平基础上,提出了一种工艺实现相对简单、可快速工程化的硅基光子集成芯片光纤陀螺设计方案。基于开环光纤陀螺架构,设计并加工了硅基光子芯片,实现了陀螺全部无源器件的片上集成,光子芯片尺寸约4 mm×3 mm;设计加工了四通道超细径保偏光纤阵列,实现波导与光纤多个耦合点的一次对准,大幅提高耦合封装效率;实现了光子集成芯片光纤陀螺样机25℃时零偏稳定性达到0.2°/h,性能优于相同结构的传统全光纤器件光纤陀螺。The optical fiber gyroscope(FOG)used to measure the rotation angular velocity is the key component of the inertial navigation system.A mass number of FOGs with small size and low cost are needed in the military and civilian applications for future.It’s an important development trend that the traditional discrete optical fiber devices in the FOG are replaced by a photonics integrated chip.As a result,a low producing cost and incremental output could be achieved taking advantages of large-scale mass production by the photolithographic process in the integrated optics.A silicon photonics integrated chip based optical fiber gyroscope is designed and realized based on the internal chip process ability,which can be simply implemented and practically applied rapidly.An optical chip on the silicon substrate is designed for the open-loop FOG,and all the positive devices are integrated into the chip with a small size of about 4 mm×3 mm.A four-channel ultra-fine polarization maintaining fiber array is designed and manufactured to achieve a precise alignment for several waveguide-fiber points at one time,which can significantly improve the package production efficiency.A photonics integrated chip based FOG prototype is built successfully with a bias stability of 0.2°/h at 25℃which is better than the same conventional full fiber device FOG.

关 键 词：光纤陀螺 光子集成芯片 硅基光波导 超细径保偏光纤阵列 

分 类 号：TN249[电子电信—物理电子学] TN256